Tajima, Satomi

J-GLOBAL         Last updated: May 7, 2019 at 20:16
Tajima, Satomi
K. K. Air Liquide Laboratories
Job title
Group manager


Satomi Tajima is specialized in plasma assisted surface modification of materials, adhesion improvement of dissimilar materials, and molecular orbital simulation of etching gases. She is responsible for developing new dry process gases and precursors for etching and atomic layer deposition (ALD). Her hobbies are photography, gardening, birdwatching, and cooking.

Research Areas


Academic & Professional Experience

Apr 2019
Group Manager, Analysis & Fine Chemistry, K. K. Air Liquide Laboratories
Jan 2016
Mar 2019
Researcher, Electronics Packaging Lab, Toyota Central R&D Labs., Inc.
Jan 2012
Dec 2015
Project Associate Professor, Plasma Nanotechnology Research Lab, Graduate School of Engineering, Nagoya University
Oct 2008
Dec 2011
Project Researcher, Dept. of Bioengineering, Graduate School of Engineering, The University of Tokyo
Nov 2006
May 2008
Systems Engineer, Lighting, Consumer & Industrial, General Electric Company


Dec 2006
Aug 2002
Department of Mechanical Engineering, Graduate School of Engineering, The University of California at Berkeley
Dec 2001
Mar 2001
Materials Science and Engineering, Graduate School of Engineering, The University of Washington
Sep 1998
Mar 2001
Department of Aeronautics & Astronautics, Graduate School of Engineering, The University of Washington

Published Papers

M. Uranagase, S. Ogata, K. Tanaka, H. Mori, and S. Tajima
J. Chem. Phys.   149 064703-1-064703-1 - 064703-9   Aug 2018   [Refereed]
Satomi Tajima, Toshikazu Satoh, Toshitaka Ishizaki, Masanori Usui
J. Mater. Sci.: Mater. Electron.   28(12) 8764-8770   Feb 2017   [Refereed]
M. Usui, T. Satoh, H. Kimura, S. Tajima, Y. Hayashi, D. Setoyama, M. Kato
Microelec. Reliab.   78 93-99   Nov 2017   [Refereed]
A. Javid, M. Kumar, S. Yoon, J. H. Lee, S. Tajima, M. Hori, J. G. Han
J. Phys. D: Appl. Phys.   49 264001-1-7   May 2016   [Refereed][Invited]
M. Kumar, J. X. Piao, S. B. Jin, J. H. Lee, S. Tajima, M. Hori, and J. G. Han
Archives of Biochemistry and Biophysics   605 41-48   May 2016   [Refereed]

Books etc

The effect of humidity on the chemical dry etching of Si using F2 + NOx -> F + FNOx reaction
Satomi Tajima (Part:Contributor)
Jun 2015   

Conference Activities & Talks

K. Tanaka, H. Mori, M. Uranagase, S. Ogata, S. Tajima
19 Jul 2018   
H. Akiyama, K. Hasegawa, T. Sekigawa, S. Tajima
4th International Conference on Structural Adhesive Bonding (AB2017)   6 Jul 2017   
M. Uranagase, K. Tanaka, H. Mori, S. Tajima, S. Ogata
30 Nov 2016   
Modeling molecules responsible for the sidewall protection during the chemical dry etching of silicon related materials using F2 + NOx -> F + FNOx
S. Tajima, T. Hayashi, K. Yamakawa, M. Sasaki, K. Ishikawa, M. Sekine, and M. Hori
9th International Conference on Reactive Plasmas/68rd Gaseous Electronics Conference /33th Symposium on Plasma Processing, (ICRP-9/GEC-68/SPP-33)   14 Oct 2015   
Effects of Fluorine Termination of Carbon Nanowall Edges on Their Electrical Properties by Ar/NO/F2 Mixture Gas Treatments
H. J. Cho, S. Tajima, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hiramatsu, M. Hori
9th International Conference on Reactive Plasmas/68rd Gaseous Electronics Conference/33th Symposium on Plasma Processing, (ICRP-9/GEC-68/SPP-33)   16 Oct 2015   

Research Grants & Projects

The Japan Society for the Promotion of Science (JSPS): 2015 Hirameki Tokimeki Science
Project Year: Apr 2015 - Mar 2016    Investigator(s): Satomi Tajima
Ministry of Education, Culture, Sports, Science and Technology-Japan (MEXT): Grant-in-aid for Young Researcher (A) (KAKENHI Wakate A 26706022)
Project Year: Apr 2014 - Mar 2017    Investigator(s): Satomi Tajima
Development of the non-destructive high-speed in-line plasma adhesion pre-treatment evaluation system
Ministry of Education, Culture, Sports, Science and Technology-Japan (MEXT): Female researcher promotion joint university funding
Project Year: Jan 2015 - Mar 2015    Investigator(s): Satomi Tajima
Ministry of Economy, Trade and Industry: Regional open platform support program at universities
Project Year: Jul 2014 - Mar 2015    Investigator(s): Nagoya University (prepared by S. Tajima)
Ministry of Education, Culture, Sports, Science and Technology-Japan (MEXT): Grant-in-aid for Challenging Exploratory Research (KAKENHI Houga 25600123)
Project Year: Apr 2013 - Mar 2015    Investigator(s): Satomi Tajima


特開2018-196974 : Packaging structure
S. Tajima, K. Akedo, M. Usui, R. Izumi, H. Mori, M. Ishikawa, S.Ohsawa
Toshio Hayashi, Satomi Tajima, Kenji Ishikawa, Masaru Hori
Hori, Masaru; Ishikawa, Kenji; Tajima, Satomi; Hayashi, Toshio

Social Contribution

[Lecturer, Demonstrator]  Nagoya University URA  Aichi Science Festival  4 Aug 2015 - 4 Aug 2015
[Lecturer]  Nagoya University URA  Nagoya University Open Lecture  (http://www.nagoya-u.ac.jp/about-nu/public-relations/publication/upload_images/no.264.pdf)  21 Mar 2015 - 21 Mar 2015
[Planner, Demonstrator]  Nagoya University  Science, and Me, "Materials Science of Human Skin"  18 Feb 2015 - 18 Feb 2015
[Lecturer, Demonstrator]  Nagoya University  Aichi Science Festival  (Aichi Science Festival)  1 Nov 2014 - 1 Nov 2014


Nov 2014   Green Expo 2014 exhibition
Jun 2014   International Forum on the Nanotechnology