論文

査読有り
2005年5月

n型シリコン上へのマスクレス銅パターン形成

表面技術(The Journal of the Surface Finishing Society of Japan)
  • 黒川明成
  • ,
  • 作花哲夫
  • ,
  • 尾形幸生

56
5
開始ページ
281
終了ページ
285
記述言語
日本語
掲載種別
研究論文(学術雑誌)
DOI
10.4139/sfj.56.281
出版者・発行元
The Surface Finishing Society of Japan

We reported laser-assisted maskless metal patterning on p-type silicon previously. The process uses photo-excited electrons, and therefore it is applicable only to p-type silicon, because the n-type has abundant free electrons, and selective metal deposition cannot be expected. In the present work, we studied the possibility of achieving the metal patterning on n-type silicon. Various noble metals can be deposited on silicon by immersion plating. In the immersion plating of copper, deposition is observed on a porous silicon surface, but not on a flat silicon surface. Porous silicon is formed by silicon anodization. The reaction requires holes, and n-type silicon lacks enough holes to promote the dissolution reaction. When the surface is locally illuminated by a laser, the photo-excited area can be locally anodized, and a porous silicon pattern can be formed in n-type silicon without a mask. Using the above, copper deposition dependent upon the surface state and porous silicon patterning on the surface, we succeeded in patterning copper on n-type silicon without using a mask.<br>

リンク情報
DOI
https://doi.org/10.4139/sfj.56.281
CiNii Articles
http://ci.nii.ac.jp/naid/10015665642
CiNii Books
http://ci.nii.ac.jp/ncid/AN1005202X
URL
http://id.ndl.go.jp/bib/7371870
URL
https://jlc.jst.go.jp/DN/JALC/00250494499?from=CiNii
ID情報
  • DOI : 10.4139/sfj.56.281
  • ISSN : 0915-1869
  • CiNii Articles ID : 10015665642
  • CiNii Books ID : AN1005202X

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