The purpose of this paper is to present the higher order formalization of RDF and OWL with setting up ontological meta-modeling criteria through the discussion of Russell’s Ramified Type Theory, which was developed in order to solve Russell Paradox appeared at the last stage in the history of set theory. This paper briefly summarize some of set theories, and reviews the RDF and OWL Semantics with higher order classes from the view of Russell’s Principia Mathematica. Then, a set of criteria is proposed for ontological meta-modeling. Several examples of meta-modeling, including sound ones and unsound ones, are discussed and some of solutions are demonstrated according to the meta-modeling criteria proposed.