論文

査読有り 責任著者
2022年

Time-resolved measurement of radical populations in extreme-ultraviolet-light-induced hydrogen plasma

Applied Physics Express
  • Chang Liu
  • ,
  • Nozomi Tanaka
  • ,
  • Baojun Zhu
  • ,
  • Katsunobu Nishihara
  • ,
  • Shinsuke Fujioka
  • ,
  • Kyung Sik Kang
  • ,
  • Youngduk Suh
  • ,
  • Jeong Gil Kim
  • ,
  • Ken Ozawa
  • ,
  • Minoru Kubo

15
3
記述言語
掲載種別
研究論文(学術雑誌)
DOI
10.35848/1882-0786/ac4faa

We have investigated hydrogen plasma induced by intense extreme ultraviolet (EUV) radiation by measuring the plasma parameters and population density of radicals, which is expected to clean the tin contamination on the optics in EUV sources, using a time-resolved optical emission spectroscopy. The obtained electron density was n e = (2 ± 0.4) × 1013 cm-3, and the electron temperature was T e = 1 ± 0.2 eV. The electron density was five orders of magnitude higher than that of previous study. The radical population density determined by the experiment was consistent with that calculated with a collisional radiative model, showing excitation and recombination are dominant production processes.

リンク情報
DOI
https://doi.org/10.35848/1882-0786/ac4faa
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85125844141&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85125844141&origin=inward
ID情報
  • DOI : 10.35848/1882-0786/ac4faa
  • ISSN : 1882-0778
  • eISSN : 1882-0786
  • SCOPUS ID : 85125844141

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