論文

査読有り
2019年9月

無酸素パラジウム/チタンを用いた新しい非蒸発型ゲッターコーティングの開発,放射光X線光電子分光による表面分析,残留ガス分析,排気速度評価

表面と真空
  • 宮澤 徹也
  • ,
  • 栗原 真志
  • ,
  • 大野 真也
  • ,
  • 橋本 綾子
  • ,
  • 中山 泰生
  • ,
  • 小澤 健一
  • ,
  • 菊地 貴司
  • ,
  • 間瀬 一彦

62
9
開始ページ
568
終了ページ
573
記述言語
日本語
掲載種別
研究論文(学術雑誌)
DOI
10.1380/vss.62.568
出版者・発行元
公益社団法人 日本表面真空学会

<p>We have developed a novel nonevaporable getter named oxygen-free Pd/Ti. After activation at 133℃, oxygen-free Pd/Ti evacuates H<sub>2</sub> and CO. Its pumping speeds do not decrease even after repeated cycles of activation and exposure to the air. Surface analysis by synchrotron radiation X-ray photoelectron spectroscopy showed that the carbon contamination decreased to an extent on heating in UHV, but decreased considerably on heating under an O<sub>2</sub> pressure. The partial pressures of H<sub>2</sub>, CO, H<sub>2</sub>O, and CH<sub>4</sub> in an oxygen-free-Pd/Ti coated chamber reduced to some degree after baking in UHV, but reduced remarkably after baking under an O<sub>2</sub> pressure (O<sub>2</sub> baking). Catalytic chemical reactions which remove carbon and hydrogen adsorbed on Pd surfaces appear to be responsible for the reduction of the partial pressures of H<sub>2</sub>, CO, H<sub>2</sub>O, and CH<sub>4</sub>. The pumping speeds of the oxygen-free Pd/Ti coated chamber for H<sub>2</sub> and CO improved remarkably after O<sub>2</sub> baking.</p>

リンク情報
DOI
https://doi.org/10.1380/vss.62.568
CiNii Articles
http://ci.nii.ac.jp/naid/130007705422
ID情報
  • DOI : 10.1380/vss.62.568
  • ISSN : 2433-5835
  • CiNii Articles ID : 130007705422

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