2019年9月
無酸素パラジウム/チタンを用いた新しい非蒸発型ゲッターコーティングの開発,放射光X線光電子分光による表面分析,残留ガス分析,排気速度評価
表面と真空
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- 巻
- 62
- 号
- 9
- 開始ページ
- 568
- 終了ページ
- 573
- 記述言語
- 日本語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1380/vss.62.568
- 出版者・発行元
- 公益社団法人 日本表面真空学会
<p>We have developed a novel nonevaporable getter named oxygen-free Pd/Ti. After activation at 133℃, oxygen-free Pd/Ti evacuates H<sub>2</sub> and CO. Its pumping speeds do not decrease even after repeated cycles of activation and exposure to the air. Surface analysis by synchrotron radiation X-ray photoelectron spectroscopy showed that the carbon contamination decreased to an extent on heating in UHV, but decreased considerably on heating under an O<sub>2</sub> pressure. The partial pressures of H<sub>2</sub>, CO, H<sub>2</sub>O, and CH<sub>4</sub> in an oxygen-free-Pd/Ti coated chamber reduced to some degree after baking in UHV, but reduced remarkably after baking under an O<sub>2</sub> pressure (O<sub>2</sub> baking). Catalytic chemical reactions which remove carbon and hydrogen adsorbed on Pd surfaces appear to be responsible for the reduction of the partial pressures of H<sub>2</sub>, CO, H<sub>2</sub>O, and CH<sub>4</sub>. The pumping speeds of the oxygen-free Pd/Ti coated chamber for H<sub>2</sub> and CO improved remarkably after O<sub>2</sub> baking.</p>
- リンク情報
- ID情報
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- DOI : 10.1380/vss.62.568
- ISSN : 2433-5835
- CiNii Articles ID : 130007705422