2016年
Development of a local light stimulation device integrated with micro electrode array
Mechanical Engineering Journal
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- 巻
- 3
- 号
- 4
- 開始ページ
- 15
- 終了ページ
- 00570
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1299/mej.15-00570
- 出版者・発行元
- Japan Society of Mechanical Engineers
In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated by using organic materials such as polymer. The proposed fabrication method consists of photolithography and wet-etching process only. The shape of fabricated microlenses measured by a white light interferometer was the diameter of 111.5 mu m, the depth of 45.5 mu m, and the focal length 320 mu m. The impedance of Platinum black electroplated on the fabricated electrode pads was reduced to 200 k Omega. As the results, it is succeeded to integrate electrode pads, microlenses and pinholes without plasma etching process. The fabricated dish is assembled with a light irradiation device having two LEDs. By the light irradiation test, the fabricated dish is expected to be utilized in a variety of neuroscience researches. By the test for cytotoxicity, it is succeeded to create neural network on the fabricated dish.
- リンク情報
- ID情報
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- DOI : 10.1299/mej.15-00570
- ISSN : 2187-9745
- ORCIDのPut Code : 27981684
- Web of Science ID : WOS:000434620200004