2015年4月
Thermal reactive ion etching technique involving use of self-heated cathode
REVIEW OF SCIENTIFIC INSTRUMENTS
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- ,
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- 巻
- 86
- 号
- 4
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/1.4917193
- 出版者・発行元
- AMER INST PHYSICS
In this work, the thermal reactive ion etching (TRIE) technique for etching hard-to-etch materials is presented. The TRIE technique employs a self-heated cathode and a thermally insulated aluminum plate is placed on the cathode of a regular reactive ion etching (RIE) system. By optimizing the beam size to support the sample stage, the temperature of the stage can be increased to a desired temperature without a cathode heater. The technique was used to etch a bulk titanium plate. An etch rate of 0.6 mu m/min and an etch selectivity to nickel of 100 were achieved with SF6 plasma. The proposed technique makes a regular RIE system a more powerful etcher without the use of chlorine gas, a cathode heater, and an inductively coupled plasma source. (C) 2015 AIP Publishing LLC.
- リンク情報
- ID情報
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- DOI : 10.1063/1.4917193
- ISSN : 0034-6748
- eISSN : 1089-7623
- Web of Science ID : WOS:000353837700054