2008年
Fabrication and normal/shear stress responses of tactile sensors of polymer/Si cantilevers embedded in PDMS and urethane gel elastomers
IEEJ Transactions on Sensors and Micromachines
ダウンロード
プレプリント・著者最終稿
回数 : 93
- ,
- ,
- ,
- ,
- ,
- ,
- 巻
- 128
- 号
- 5
- 開始ページ
- 193
- 終了ページ
- 197
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1541/ieejsmas.128.193
Cantilever-type tactile sensors of silicon-polymer beam structures were fabricated by surface micromachining and covering with elastomers. Two kinds of elastomers with different Young's modulus PDMS and urethane gel have been used to control deflection of the cantilevers and adjust the sensitivity cantilever-type tactile sensors. The resistance change of the sensor with PDMS has linear dependence on normal and shear stresses, but that of the sensor with urethane gel is nonliner to normal and shear stresses. However, the sensitivity of urethane gel type sensor is about 30 times larger than PDMS type sensor. © 2008 The Institute of Electrical Engineers of Japan.
- リンク情報
-
- DOI
- https://doi.org/10.1541/ieejsmas.128.193
- CiNii Articles
- http://ci.nii.ac.jp/naid/10021135275
- URL
- https://www.jstage.jst.go.jp/article/ieejsmas/128/5/128_5_193/_article/
- Scopus
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=73849141296&origin=inward 本文へのリンクあり
- Scopus Citedby
- https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=73849141296&origin=inward
- ID情報
-
- DOI : 10.1541/ieejsmas.128.193
- ISSN : 1341-8939
- ISSN : 1347-5525
- eISSN : 1347-5525
- CiNii Articles ID : 10021135275
- SCOPUS ID : 73849141296