論文

査読有り
2020年11月18日

On-Chip Optical Gas Sensors Based on Group-IV Materials

ACS Photonics
  • Jingwen Wu
  • Gongcheng Yue
  • Weicheng Chen
  • Zhengkun Xing
  • Jiaqi Wang
  • Wei Ru Wong
  • Zhenzhou Cheng
  • Sze Yun Set
  • Ganapathy Senthil Murugan
  • Xingjun Wang
  • Tiegen Liu
  • 全て表示

7
11
開始ページ
2923
終了ページ
2940
記述言語
英語
掲載種別
DOI
10.1021/acsphotonics.0c00976
出版者・発行元
American Chemical Society (ACS)

Compact and smart optical gas sensors have attracted significant attention over the past few decades. Among the materials used for developing such gas sensors, group-IV materials, including silicon, germanium, carbon allotropes, and their compounds, are considered the most promising candidates. By virtue of their inherent compatibility with the CMOS fabrication process in the mature microelectronics industry, on-chip optical gas sensors based on group-IV materials have merits of appreciable sensitivity and high-density integration. Moreover, such sensors have promising potential to be integrated with other electronic or photonic devices for on-chip signal processing and communication, which are expected to enable versatile applications in the internet of things, point-of-care testing, and information and communication technology. This paper is the review of basic principles, state-of-the-art devices, and cutting-edge applications of on-chip optical gas sensors based on group-IV materials and discussions of their prospects.

リンク情報
DOI
https://doi.org/10.1021/acsphotonics.0c00976
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000592916800001&DestApp=WOS_CPL
URL
https://pubs.acs.org/doi/pdf/10.1021/acsphotonics.0c00976
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85096917736&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85096917736&origin=inward
ID情報
  • DOI : 10.1021/acsphotonics.0c00976
  • ISSN : 2330-4022
  • eISSN : 2330-4022
  • SCOPUS ID : 85096917736
  • Web of Science ID : WOS:000592916800001

エクスポート
BibTeX RIS