In the cleaning processes of manufacturing semiconductor devices, two-fluid spray cleaning technique is widely used: however, the detailed cleaning mechanism has not been clarified yet. In this study, we focus our attention to the elementary process of this cleaning technique, i.e. a single droplet impact on a solid surface. We experimentally observe impact of single droplet on a rigid solid surface with the use of high-speed photography, and we discuss the deformation of the droplet. Especially we focus on the effects of surfaces tension, surface roughness and surrounding pressure. Water droplets always create lamella during spreading after the impact on a smooth surface in the atmospheric pressure condition. Either decrease of the surface tension or increase of the surface roughness causes droplet splash. However, decrease of the surrounding gas pressure makes droplets always create lamella even in the cases with low surface tension and rough surfaces.