論文

査読有り
2018年6月1日

Semi-analytical model for a static sheath including a weakly collisional presheath

Japanese Journal of Applied Physics
  • Tatsuru Shirafuji
  • ,
  • Kazuki Denpoh

57
6
開始ページ
06JG02
終了ページ
8pp
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.7567/JJAP.57.06JG02
出版者・発行元
Japan Society of Applied Physics

A semi-analytical static sheath (SASS) model can provide a spatial potential profile on a biased surface with microstructures, which can be used for predicting ion trajectories on the surface. However, two- or three-dimensional SASS models require a search procedure for a sheath edge equipotential profile, at which ions have the Bohm velocity, as the starting positions for calculating ion trajectories. This procedure can be troublesome when surface microstructures have complex structures. This difficulty is due to the fact that the SASS model cannot handle a presheath region. In this work, we propose a modified SASS model that can handle a presheath region. By using the modified SASS model, ion trajectories can be calculated from edges with arbitrary geometry without searching for the equipotential profile corresponding to sheath edges.

リンク情報
DOI
https://doi.org/10.7567/JJAP.57.06JG02
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85048139646&origin=inward
ID情報
  • DOI : 10.7567/JJAP.57.06JG02
  • ISSN : 1347-4065
  • ISSN : 0021-4922
  • SCOPUS ID : 85048139646

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