2006年2月 Advanced Micro and Nanosystems, Micro Process Engineering: Fundamentals, Devices, Fabrication, And ApplicationsAdvanced Micro and Nanosystemand Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata 出版者・発行元 John Wiley & Sons Inc