論文

査読有り
2019年6月

On the Spatial Uniformity of the Degree of Ionization in a Helium ECR Plasma Produced under a Simple Cusp Field

ATOMS
  • Akira Ueda
  • ,
  • Taiichi Shikama
  • ,
  • Yohei Iida
  • ,
  • Masahiro Hasuo

7
2
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.3390/atoms7020049
出版者・発行元
MDPI

Production of a plasma that has a large degree of ionization (DOI), volume, and spatial and temporal uniformities is a challenge for the improvement of the performance of plasma-based vapor deposition processes. As a potential candidate for the discharge, we investigate plasma parameters arising in helium electron cyclotron resonance (ECR) discharges due to a simple cusp field. Two-dimensional distributions of helium atom emission-line intensities were measured using spectroscopy with multiple viewing chords and then de-convoluted by Abel inversion. The local plasma parameters, including the atomic density, were evaluated using collisional-radiative model analysis. The DOI calculated from the electron and atomic densities reached up to 35% and, in most of the region inside the ECR surface, it was more than 10%.

リンク情報
DOI
https://doi.org/10.3390/atoms7020049
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000474935800011&DestApp=WOS_CPL
ID情報
  • DOI : 10.3390/atoms7020049
  • ISSN : 2218-2004
  • Web of Science ID : WOS:000474935800011

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