2019年6月
On the Spatial Uniformity of the Degree of Ionization in a Helium ECR Plasma Produced under a Simple Cusp Field
ATOMS
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- 巻
- 7
- 号
- 2
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.3390/atoms7020049
- 出版者・発行元
- MDPI
Production of a plasma that has a large degree of ionization (DOI), volume, and spatial and temporal uniformities is a challenge for the improvement of the performance of plasma-based vapor deposition processes. As a potential candidate for the discharge, we investigate plasma parameters arising in helium electron cyclotron resonance (ECR) discharges due to a simple cusp field. Two-dimensional distributions of helium atom emission-line intensities were measured using spectroscopy with multiple viewing chords and then de-convoluted by Abel inversion. The local plasma parameters, including the atomic density, were evaluated using collisional-radiative model analysis. The DOI calculated from the electron and atomic densities reached up to 35% and, in most of the region inside the ECR surface, it was more than 10%.
- リンク情報
- ID情報
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- DOI : 10.3390/atoms7020049
- ISSN : 2218-2004
- Web of Science ID : WOS:000474935800011