1999年
荷電粒子検出のための2次元半導体素子の開発
映像情報メディア学会技術報告
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- ,
- ,
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- 巻
- 23
- 号
- 0
- 開始ページ
- 19
- 終了ページ
- 23
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.11485/itetr.23.5.0_19
- 出版者・発行元
- 一般社団法人 映像情報メディア学会
Charged particles such as ion and electrons with keV order kinetic energy are important for probes and signals for surface analyses. Many detection systems have been developed for measurement of two-dimensional distribution for the particles. However, capabilities of solid-state area detector are not sufficient for quantitative analysis for the charged particles, although solid-state imager such as charge coupled device has been great succeeded to photon detection for optical spectroscopy. This paper discussed performance and characteristics of a novel solid-state imager for charged particles. This device is useful to charged particle detection such as mass spectrometry and electron microscopy.
- リンク情報
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- DOI
- https://doi.org/10.11485/itetr.23.5.0_19
- CiNii Articles
- http://ci.nii.ac.jp/naid/110003687090
- CiNii Books
- http://ci.nii.ac.jp/ncid/AN1059086X
- ID情報
-
- DOI : 10.11485/itetr.23.5.0_19
- ISSN : 1342-6893
- CiNii Articles ID : 110003687090
- CiNii Books ID : AN1059086X
- identifiers.cinii_nr_id : 1000080191485