AOKI Takaaki

J-GLOBAL         Last updated: Sep 30, 2019 at 19:50
 
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Name
AOKI Takaaki
URL
http://sakura.nucleng.kyoto-u.ac.jp/~aoki/
Affiliation
Kyoto University
Section
Institute for Information Management and Communication
Job title
Associate Professor
Degree
Dr. Eng.(Kyoto University)
Other affiliation
Kyoto University
Research funding number
90402974
ORCID ID
0000-0002-5926-4903

Academic & Professional Experience

 
Mar 2016
 - 
Today
Associate Professor, Institute for Information Management and Communication, Kyoto University
 
Feb 2007
 - 
Feb 2016
Lecturer (Junior Associate Professor), Graduate School of Engineering, Kyoto University
 
2005
 - 
Jan 2007
Program-Specific Assistant Professor (Industry-Government-Academia Collaboration), Graduate School of Engineering, Kyoto University
 
2002
 - 
2005
Researcher for "Advanced Nanofabrication Process Technology Using Quantum Beams," committed by NEDO
 
2000
 - 
2004
Researcher for "Cluster Ion Beam Process Technology," committed by NEDO
 

Education

 
 
 - 
2000
Electronic Science and Engineering, Graduate School, Division of Engineering, Kyoto University
 
 
 - 
1997
Electronic Enginnering, Faculty of Engineering, Kyoto University
 

Published Papers

 
AOKI Takaaki, KAJITA Shoji, MOTOKI Tamaki, IYEMORI Toshihiko, KAWAGUCHI Tomoko
Proc. 2019 8th International Congress on Advanced Applied Informatics (IIAI-AAI)   387-390   Jul 2019   [Refereed]
Toshio Seki, Hiroki Yamamoto, Takahiro Kozawa, Tadashi Shojo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo
Japanese Journal of Applied Physics   56(6S2) 06HB02   May 2017   [Refereed]
青木 学聡, 久門 尚史, 木村 真之, 蛯原 義雄, 下田 宏
研究報告教育学習支援情報システム(CLE)   2017(3) 1-5   Mar 2017
Kyoto University Undergraduate School of Electrical and Electronic Engineering deployed a course of circuit exercise on the premise of BYOD-PC from FY 2016. This course is a compulsory subject for the school, so that the course curriculum was desi...
AOKI Takaaki, HISAKADO Takashi, KIMURA Masayuki, EBIHARA Yoshio, SHIMODA Hiroshi
IPSJ SIG TECHNICAL REPORT   CLE-2017-21(3) 1-5   Mar 2017
Mao Tsunekawa, Eriko Amano, Hayahiko Ozono, Yui Nishizono, Shota Maeda, Yuko Matsumoto, Yasuyuki Minamiyama, Taro Misumi, Takaki Aoki, Koichi Ojiro, Kazutsuna Yamaji
Joho Chishiki Gakkaishi   27(4) 362   2017   [Refereed]
Aoki, Takaaki Kajita, Shoji Akasaka, Hirokazu Takeda, Hagane
2017 6th IIAI International Congress on Advanced Applied Informatics (IIAI-AAI)   120-123   2017   [Refereed]
青木 学聡, 喜多 一
   Dec 2016
AXIES: 大学ICT推進協議会 2016年度 年次大会Webベースの情報システムは操作面での改善をユーザサイドでは行いにくいと いう欠点がある.コース管理システム(CMS)も教員が本格的に利用する上では授業を 受講する多くの学生と個々にインタラクションする場合の操作量が相当に多いという 課題があるがこれを実運用するサーバ側で改善することは管理上の問題なども発生す る.本報告では Sakai の課題ツールで回答を一括ダウンロードできることを利用し, 回答を効果的に閲覧するプログラムを作成...
Masakazu Kusakari, Makiko Fujii, Toshio Seki, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics   34(3) 4   May 2016   [Refereed]
© 2016 American Vacuum Society.A new secondary ion mass spectrometry device using an ion probe in the heavy mega-electron-volt (MeV) energy range was developed for detecting large intact molecules with high sensitivity under ambient conditions. Th...
AOKI Takaaki, KAJITA Shoji, AKASAKA Hirokazu, TAKEDA Hagane
AXIES Annucal Conference 2016      Dec 2016
Toshio Seki, Yu Yoshino, Takehiko Senoo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo
Japanese Journal of Applied Physics   55(6S2) 06HB01   May 2016   [Refereed]
Hubert Gnaser, Hubert Gnaser, Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics   34(3) 5   May 2016   [Refereed]
© 2016 American Vacuum Society.The emission of sputtered ions from isoleucine and leucine specimens under bombardment by 10 keV argon gas-cluster ions Ar 1000 + was investigated by orthogonal time-of-flight secondary ion mass spectrometry, in an a...
Toshio Seki, Masakazu Kusakari, Makiko Fujii, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   371 189-193   Mar 2016   [Refereed]
© 2015 Elsevier B.V. All rights reserved.Secondary ion mass spectrometry (SIMS) is a method with high surface sensitivity that allows both elemental and molecular analysis. However, volatile liquid (wet) samples are difficult to measure using conv...
Rie Shishido, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo, Shigeru Suzuki
Rapid Communications in Mass Spectrometry   30(4) 476-482   Feb 2016   [Refereed]
© 2016 John Wiley & Sons, Ltd.Rationale Bi cluster ions are used as a source of primary ions for time-of-flight secondary ion mass spectrometry (TOF-SIMS), and it has been recognized that secondary ion yields of macromolecules are higher with Bi c...
Matsuo J, Fujii M, Seki T, Aoki T.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering   82(4) 309-314   Jan 2016   [Refereed]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
Surface and Coatings Technology   306 63-68   Feb 2016   [Refereed]
© 2016 Elsevier B.V.Molecular dynamics (MD) simulations are performed in order to investigate the radiation effects of a huge and slow gas cluster for the surface cleaning process. When a large argon cluster with the size ranging from 20,000 to 30...
Matsuo J, Fujii M, Seki T, Aoki T.
Journal of the Vacuum Society of Japan   59(5) 113-120   Jan 2016   [Refereed]
Recent progress of cluster ion beam was overviewed. Various applications, such as nano-fabrication and biological material analysis, have been developed by using cluster effects, which are due to high-density and multiple collision between cluster...
I. Yamada, J. Matsuo, N. Toyoda, T. Aoki, T. Seki
Current Opinion in Solid State and Materials Science   19(1) 12-18   Feb 2015   [Refereed]
Suzuki K, Kusakari M, Fujii M, Seki T, Aoki T, Matsuo J.
Surface and Interface Analysis   48(11) 1121-1121   2016   [Refereed]
Masakazu Kusakari, Hubert Gnaser, Makiko Fujii, Toshio Seki, Toshio Seki, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo, Jiro Matsuo
International Journal of Mass Spectrometry   383-384 31-37   Jan 2015
© 2015 Published by Elsevier B.V.Ten pure amino acid specimens (alanine, arginine, asparagine, glutamine, glutamic acid, isoleucine, leucine, phenylalanine, threonine, and tyrosine) and three binary mixtures (phenylalanine/tyrosine, phenylalanine/...
Toshio Seki, Yoshinobu Wakamatsu, Shunichiro Nakagawa, Takaaki Aoki, Akihiko Ishihara, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   332    Aug 2014   [Refereed]
Toshio Seki, Makiko Fujii, Masakazu Kusakari, Shunichiro Nakagawa, Takaaki Aoki, Jiro Matsuo
Surface and Interface Analysis   46(12-13)    Dec 2014   [Refereed]
Makiko Fujii, Shunichirou Nakagawa, Kazuhiro Matsuda, Naoki Man, Toshio Seki, Takaaki Aoki, Jiro Matsuo
RAPID COMMUNICATIONS IN MASS SPECTROMETRY   28(8)    Apr 2014   [Refereed]
RATIONALE: Ar gas cluster ion beam secondary ion mass spectrometry (Ar-GCIB SIMS) has been developed as one of the most powerful tools used for analyzing complex biological materials because of its distinctively high secondary ion yield of large o...
Jiro Matsuo, Souta Torii, Kazuki Yamauchi, Keisuke Wakamoto, Masakazu Kusakari, Shunichiro Nakagawa, Makiko Fujii, Takaaki Aoki, Toshio Seki
APPLIED PHYSICS EXPRESS   7(5) 1-56602   May 2014   [Refereed]
Recent developments in cluster ion beams for secondary ion mass spectrometry (SIMS) have enabled the realization of molecular depth profiling and mass imaging of organic and biological materials. Massive Ar cluster beams present reduced surface da...
Hubert Gnaser, Makiko Fujii, Shunichirou Nakagawa, Toshio Seki, Takaaki Aoki, Jiro Matsuo
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY   360(1)    Mar 2014   [Refereed]
Makiko Fujii, Masakazu Kusakari, Kazuhiro Matsuda, Naoki Man, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Surface and Interface Analysis   46 353-356   Jan 2014
Copyright © 2014 John Wiley & Sons, Ltd.Secondary ion mass spectrometry (SIMS) is one of the powerful methods that can be applied to high sensitivity mass analysis and high-spatial resolution mass imaging. For the analysis of minor components of t...
Makiko Fujii, Shunichirou Nakagawa, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Surface and Interface Analysis   46 1129-1132   Jan 2014
© 2014 John Wiley & Sons, Ltd.Ar gas cluster ion beam (Ar-GCIB) SIMS has been developed as one of the powerful tools used for analyzing organic materials because of the high secondary ion yield of large organic molecules due to 'soft' sputtering m...
T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki, J. Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   315    Nov 2013   [Refereed]
Kazuya Dobashi, Kensuke Inai, Misako Saito, Toshio Seki, Takaaki Aoki, Jiro Matsuo
IEEE Transactions on Semiconductor Manufacturing   26 328-334   Aug 2013
In this paper, the ultrafine particle removal using CO2 gas cluster ion beam (GCIB) technology is investigated. The CO2 GCIB is irradiated the sample at an angle of 0 with respect to the surface normal. The higher particle removal efficiency can b...
Kazuya Dobashi, Kensuke Inai, Misako Saito, Toshio Seki, Takaaki Aoki, Jiro Matsuo
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING   26(3)    Aug 2013   [Refereed]
Hubert Gnaser, Makiko Fujii, Shunichirou Nakagawa, Toshio Seki, Takaaki Aoki, Jiro Matsuo
RAPID COMMUNICATIONS IN MASS SPECTROMETRY   27(13) 1490-1496   Jul 2013   [Refereed]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   303 170-173   May 2013   [Refereed]
Yasuyuki Yamamoto, Kazuya Ichiki, Toshio Seki, Takaaki Aoki, Jiro Matsuo
SURFACE AND INTERFACE ANALYSIS   45(1) 167-170   Jan 2013   [Refereed]
K. Ichiki, J. Tamura, T. Seki, T. Aoki, J. Matsuo
SURFACE AND INTERFACE ANALYSIS   45(1)    Jan 2013   [Refereed]
Aoki T.
Journal of Computational Electronics   1-14   2013   [Refereed]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   282    Jul 2012   [Refereed]
J. Matsuo, K. Ichiki, Y. Yamamoto, T. Seki, T. Aoki
SURFACE AND INTERFACE ANALYSIS   44(6)    Jun 2012   [Refereed]
T. Seki, T. Aoki, J. Matsuo
SURFACE & COATINGS TECHNOLOGY   206(5)    Nov 2011   [Refereed]
Masaki Hada, Sachi Ibuki, Yusaku Hontani, Yasuyuki Yamamoto, Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
JOURNAL OF APPLIED PHYSICS   110(9)    Nov 2011   [Refereed]
Yoshinobu Wakamatsu, Hideaki Yamada, Satoshi Ninomiya, Brian N. Jones, Toshio Seki, Takaaki Aoki, Roger Webb, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   269(20)    Oct 2011   [Refereed]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   269(14)    Jul 2011   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
SURFACE AND INTERFACE ANALYSIS   43(1-2)    Jan 2011   [Refereed]
K. Ichiki, S. Ninomiya, Y. Nakata, H. Yamada, T. Seki, T. Aoki, J. Matsuo
SURFACE AND INTERFACE ANALYSIS   43(1-2)    Jan 2011   [Refereed]
H. Yamada, Y. Nakata, S. Ninomiya, T. Seki, T. Aoki, J. Tamura, J. Matsuo
SURFACE AND INTERFACE ANALYSIS   43(1-2)    Jan 2011   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
SURFACE AND INTERFACE ANALYSIS   43(1-2)    Jan 2011   [Refereed]
Masaki Hada, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
SURFACE AND INTERFACE ANALYSIS   43(1-2)    Jan 2011   [Refereed]
Yoshinobu Wakamatsu, Hideaki Yamada, Satoshi Ninomiya, Satoshi Ninomiya, Brian N. Jones, Toshio Seki, Toshio Seki, Takaaki Aoki, Takaaki Aoki, Roger Webb, Jiro Matsuo, Jiro Matsuo
AIP Conference Proceedings   1321 233-236   Dec 2010
Secondary Ion Mass spectrometry (SIMS) has been generally used in the field of material sciences. In recent years, it has also been applied for molecular imaging of biological samples. Nevertheless, molecular ions derived from the large molecules ...
K. Ichiki, S. Ninomiya, S. Ninomiya, T. Seki, T. Seki, T. Aoki, T. Aoki, J. Matsuo, J. Matsuo
AIP Conference Proceedings   1321 294-297   Dec 2010
Gas cluster ion presents various irradiation effects such as high sputtering yields. It is important to study the optimum condition of incident cluster ion beam for applications in surface modification technology. In this study, the effects of inc...
Y. Yamamoto, K. Ichiki, S. Ninomiya, S. Ninomiya, T. Seki, T. Seki, T. Aoki, T. Aoki, J. Matsuo, J. Matsuo
AIP Conference Proceedings   1321 298-301   Dec 2010
The sputtering yields of organic materials under large cluster ion bombardment are much higher than those under conventional monomer ion bombardment. The sputtering rate of arginine remains constant with fluence for an Ar cluster ion beam, but dec...
Kunihiko Koike, Yu Yoshino, Takehiko Senoo, Toshio Seki, Toshio Seki, Satoshi Ninomiya, Satoshi Ninomiya, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo
Applied Physics Express   3    Dec 2010
The characteristics of Si etching using nonionic cluster beams with highly reactive chlorine-trifluoride (ClF3) gas were examined. An etching rate of 40 μm/min or higher was obtained even at room temperature when a ClF3 molecular cluster was forme...
Masaki Hada, Yusaku Hontani, Sachi Ibuki, Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
AIP Conference Proceedings   1321 314-316   Dec 2010
The surface of L-leucine films irradiated with an Ar5000 cluster ion beam (5 keV) was characterized by using the X-ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the s...
T. Seki, Y. Yoshino, T. Senoo, K. Koike, S. Ninomiya, T. Aoki, J. Matsuo
AIP Conference Proceedings   1321 317-320   Dec 2010
The reactive gas cluster injection process is an etching method that uses a neutral cluster beam without plasma. ClF3-Ar neutral cluster was generated and the Si etching characteristics with this beam were investigated. ClF3 is very high reactive ...
Jiro Matsuo, Teruyuki Kitagawa, Toshio Seki, Takaaki Aoki
Toraibarojisuto/Journal of Japanese Society of Tribologists   55 776-782   Dec 2010
Takaaki Aoki, Toshio Seki, Toshio Seki, Jiro Matsuo, Jiro Matsuo
IWJT-2010: Extended Abstracts - 2010 International Workshop on Junction Technology   114-115   Jul 2010
Molecular dynamics (MD) simulations of small boron clusters impacting on silicon (100) surface were carried out. The impacts of B10, B18 and B36 accelerated with 2keV, 3.6keV and 7.6keV (200eV per boron atom) showed characteristic irradiation effe...
Masaki Hada, Sachi Ibuki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
JAPANESE JOURNAL OF APPLIED PHYSICS   49(3)    2010   [Refereed]
Kunihiko Koike, Yu Yoshino, Takehiko Senoo, Toshio Seki, Satoshi Ninomiya, Takaaki Aoki, Jiro Matsuo
APPLIED PHYSICS EXPRESS   3(12)    2010   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Transactions of the Materials Research Society of Japan   35(4)    Dec 2010   [Refereed]
K Ichiki, S Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Transactions of the Materials Research Society of Japan   35(4)    Dec 2010   [Refereed]
H Yamada, K Ichiki, Y Nakata, S Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Transactions of the Materials Research Society of Japan   35(4)    Dec 2010   [Refereed]
Jiro Matsuo, Satoshi Ninomiya, Hideaki Yamada, Kazuya Ichiki, Yoshinobu Wakamatsu, Masaki Hada, Toshio Seki, Takaaki Aoki
SURFACE AND INTERFACE ANALYSIS   42(10-11)    Oct 2010   [Refereed]
Hideaki Yamada, Kazuya Ichiki, Yoshihiko Nakata, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   268(11-12)    Jun 2010   [Refereed]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
VACUUM   84(8)    Mar 2010   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
RAPID COMMUNICATIONS IN MASS SPECTROMETRY   23(20)    Oct 2009   [Refereed]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   267(18)    Sep 2009   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Toshio Seki, Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   267(16)    Aug 2009   [Refereed]
T. Aoki, J. Matsuo
Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009      Jun 2009   [Refereed]
J. Matsuo, K. Ichiki, M. Hada, S. Ninomiya, T. Seki, T. Aoki, T. Nagayama, M. Tanjyo
Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009      Jun 2009   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
RAPID COMMUNICATIONS IN MASS SPECTROMETRY   23(11)    Jun 2009   [Refereed]
Y. Nakata, H. Yamada, Y. Honda, S. Ninomiya, T. Seki, T. Aoki, J. Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   267(12-13)    Jun 2009   [Refereed]
Takaaki Aoki, Toshio Seki, Satoshi Ninomiya, Kazuya Ichiki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   267(8-9)    May 2009   [Refereed]
T. Seki, T. Aoki, J. Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   267(8-9)    May 2009   [Refereed]
Low Damage Etching of Polymer Materials for Depth Profile Analysis Using Large Ar Cluster Ion Beam
Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Journal of Surface Analysis   15(3)    Feb 2009   [Refereed]
Yoshihiko Nakata, Yoshiro Honda, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
JOURNAL OF MASS SPECTROMETRY   44(1)    Jan 2009   [Refereed]
Hideaki Yamada, Kazuya Ichiki, Yoshihiko Nakata, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Journal of the Mass Spectrometry Society of Japan   57(3)    Jan 2009   [Refereed]
J MATSUO, S NINOMIYA, Y NAKATA, Y HONDA, K ICHIKI, T SEKI, T AOKI
Applied Surface Science   255(4)    Dec 2008   [Refereed]
K. Ichiki, S. Ninomiya, Y. Nakata, Y. Honda, T. Seki, T. Aoki, J. Matsuo
APPLIED SURFACE SCIENCE   255(4)    Dec 2008   [Refereed]
SIMS Analysis of Biological Mixtures with Fast Heavy Ion Irradiation
Yoshiro Honda, Yoshihiko Nakata, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Transactions of the MRS-J   33(4)    Dec 2008   [Refereed]
S NINOMIYA, K ICHIKI, Y NAKATA, Y HONDA, T SEKI, T AOKI, J MATSUO
Applied Surface Science   255(4)    Dec 2008   [Refereed]
Satoshi Ninomiya, Yoshihiko Nakata, Yoshiro Honda, Kazuya Ichiki, Toshio Seki, Takaaki Aoki, Jiro Matsuo
APPLIED SURFACE SCIENCE   255(4)    Dec 2008   [Refereed]
High-Speed Nano-Processing with Cluster Ion Beams
Toshio Seki, Takaaki Aoki, Jiro Matsuo
Transactions of the MRS-J   33(4)    Dec 2008   [Refereed]
Y. Nakata, Y. Honda, S. Ninomiya, T. Seki, T. Aoki, J. Matsuo
APPLIED SURFACE SCIENCE   255(4)    Dec 2008   [Refereed]
T AOKI, T SEKI, S NINOMIYA, J MATSUO
Applied Surface Science   255(4)    Dec 2008   [Refereed]
Low Damage Etching and SIMS Depth Profiling with Large Ar Cluster Ions
Satoshi Ninomiya, Jiro Matsuo, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Yoshiro Honda, Toshio Seki, Takaaki Aoki
Transactions of the MRS-J   33(4)    Dec 2008   [Refereed]
Takeshi Hikata, Kazuhiko Hayashi, Tomoyuki Mizukoshi, Yoshiaki Sakurai, Itsuo Ishigami, Takaaki Aoki, Toshio Seki, Jiro Matsuo
Applied Physics Express   1    Feb 2008   [Refereed]
The Effect of Incident Cluster Ion Size on Secondary Ion Yields Produced from Si
S Ninomiya, K Ichiki, Y Nakata, T Seki, T Aoki, Matsuo J
Transactions of the Materials Research Society of Japan   32(4)    Dec 2007   [Refereed]
S. Kakuta, S. Sasaki, K. Furusawa, T. Seki, T. Aoki, J. Matsuo
SURFACE & COATINGS TECHNOLOGY   201(19-20)    Aug 2007   [Refereed]
Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   261(1-2)    Aug 2007   [Refereed]
Takaaki Aoki, Toshio Seki, Satoshi Ninomiya, Jiro Matsuo
SURFACE & COATINGS TECHNOLOGY   201(19-20)    Aug 2007   [Refereed]
Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   257    Apr 2007   [Refereed]
Jiro Matsuo, Satoshi Ninomiya, Yoshihiko Nakata, Kazuya Ichiki, Takaaki Aoki, Toshio Seki
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   257    Apr 2007   [Refereed]
Satoshi Ninomiya, Kazuya Ichiki, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   256(1)    Mar 2007   [Refereed]
Satoshi Ninomiya, Yoshihiko Nakata, Kazuya Ichiki, Toshio Seki, Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   256(1)    Mar 2007   [Refereed]
K. Ichiki, S. Ninomiya, T. Seki, T. Aoki, J. Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   256(1)    Mar 2007   [Refereed]
Takaaki Aoki, Jiro Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   255(1)    Feb 2007   [Refereed]
T. Aoki, J. Matsuo
Materials Research Society Symposium Proceedings   908    2006   [Refereed]
Satoshi Ninomiya, Takaaki Aoki, Toshio Seki, Jiro Matsuo
APPLIED SURFACE SCIENCE   252(19)    Jul 2006   [Refereed]
Satoshi Ninomiya, Takaaki Aoki, Toshio Seki, Jiro Matsuo
APPLIED SURFACE SCIENCE   252(19)    Jul 2006   [Refereed]
Takaaki Aoki, Jiro Matsuo
APPLIED SURFACE SCIENCE   252(19)    Jul 2006   [Refereed]
T Aoki, J Matsuo
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   242(1-2)    Jan 2006   [Refereed]
T. Aoki, J. Matsuo
Materials Research Society Symposium Proceedings   843    2005   [Refereed]

Books etc

 
ION IMPLANTATION TECHNOLOGY 2010: 18th International Conference on Ion Implantation Technology IIT 2010 (AIP conference proceedings CP1321)
Eds. Jiro Matsuo, Masataka Kase, Takaaki Aoki and Toshio Seki (Part:Joint Editor)
American Institute of Physics   Jan 2011   

Conference Activities & Talks

 
AOKI Takaaki
2nd Kyoto University Research Data Management Workshop   28 Feb 2019   
AOKI Takaaki
2nd Kyoto University Research Data Management Workshop   28 Feb 2019   
Iyemori Toshihiko, Kawaguchi Tomoko, Motoki Tamaki, Aoki Takaaki, Kajita Shoji, Amano Eriko
2nd Kyoto University Research Data Management Workshop   28 Feb 2019   
Kawaguchi Tomoko, Iyemori Toshihiko, Motoki Tamaki, Aoki Takaaki, Kajita Shoji
2nd Kyoto University Research Data Management Workshop   28 Feb 2019   
Kyoto University Academic Data Innovation Unit - bottom-up promotion for research data management environment in various fields
Takaaki AOKI, Shoji KAJITA
International Workshop on Data Science   15 Nov 2018   
Engaging Academia with Japan-wide Data Platforms and RDM CHarter
MIho FUNAMORI, Takaaki AOKI, Katsuhiko TOYAMA
FORCE2018 meeting   12 Oct 2018   
MeV-SIMS Measurement of Liquid Materials at Atmospheric Pressure
Toshio SEKI, Kenta ISHII, Takaaki AOKI, Jiro MATSUO
The 79th JSAP Autumn Meeting, 2018   21 Sep 2018   The Japan Society of Applied Physics
Improvement in the Detection Sensitivity of Secondary Ions by Cs Absorption with the Mist Deposition Method on a PEG Surface
Taiki MATSUDA, Jiro MATSUO, Toshio SEKI, Takaaki AOKI
The 79th JSAP Autumn Meeting, 2018   21 Sep 2018   The Japan Society of Applied Physics
Application of image processing technique for imaging SIMS analysis
AOKI Takaaki, SEKI Toshio, MATSUO Jiro
The 79th JSAP Autumn Meeting, 2018   21 Sep 2018   The Japan Society of Applied Physics
ORCID Bootstrapping at Kyoto University
Takaaki Aoki
ORCID Japan Member Meeting   17 Apr 2018   
Detection Sensitivity Improvement of Secondary Ion by Sodium Absorption with mist deposition method on PEG Surface
Taiki Matsuda, Toshio Seki, Takaaki Aoki, Jiro Matsuo
The 65th JSAP Spring Meeting, 2018   20 Mar 2018   
Development of Ambient SIMS for Analysis of Solid-Liquid Interface
Kenta Ishii, Toshio Seki, Takaaki Aoki, Jiro Matsuo
The 65th JSAP Spring Meeting, 2018   20 Mar 2018   
Development of the Beam Detecting System Using Channel Electron Multiplier (CEM)
Shuhei Yamada, Seki Toshio, Aoki Takaaki, Matsuo Jiro
The 65th JSAP Spring Meeting, 2018   20 Mar 2018   
Fabrication of 3D structure by double-angled etching with reactive gas cluster injection
Toshio Seki, Hiroki Yamamoto, Takahiro Kozawa, Tadashi Syojo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo
The 65th JSAP Spring Meeting, 2018   20 Mar 2018   
Preliminary Study on Data Management Policy for Simulations of Ion Beam Process
Takaaki Aoki
The 65th JSAP Spring Meeting, 2018   18 Mar 2018   
Long-term archive system for university-wide research data preservation
AOKI Takaaki, KAJITA Shoji, AKASAKA Hirokazu, TAKEDA Hagane
WDS Asia-Oceania Conference, 2017   26 Sep 2017   
Surface structure after etching with ClF3 neutral cluster
Toshio Seki, Tadashi Shojo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo
The 78th JSAP Autumn Meeting, 2017   6 Sep 2017   
SIMS Measurement in Humid Condition with Pipe-Nozzle
Kenta Ishii, Toshio Seki, Takaaki Aoki, Jiro Matsuo
The 78th JSAP Autumn Meeting, 2017   6 Sep 2017   
Improvement of Secondary Ion Detection Sensitivity by Adding Sodium to PEG Surface
Taiki Matsuda, Toshio Seki, Takaaki Aoki, Jiro Matsuo
The 78th JSAP Autumn Meeting, 2017   6 Sep 2017   
Chemical analysis under ambient conditions using swift heavy ion beams
J.Matsuo, M.Kusakari, M.Fujii, T.Seki, T.Aoki
12th European Conference on Acceleratorsin Applied Research and Technology   7 Jul 2017   
Recent Progress in Cluster Beam -- from Semiconductor to Soft Materials
J. Matsuo, T. Seki, T. Aoki, M. Fujii
The 19th International Conference on Ion Beam Modification of Materials (IBMM 2014)   17 Sep 2014   
Highly Accurate Biological Analysis using Ar-GCIB SIMS with Chemical Assist Ionization
M. Fujii, S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
The 15th IUMRS-International Conference in Asia (IUMRS-ICA 2014)   25 Aug 2014   
Molecular Dynamics Simulation of Gas Cluster Impact on Coner-shaped Target
T. Aoki, T. Seki, J. Matsuo
The 15th IUMRS-International Conference in Asia (IUMRS-ICA 2014)   25 Aug 2014   
MeV-SIMS with swift heavy ions at low pressure [Invited]
Jiro Matsuo, Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki
14th International Conference on Nuclear Microprobe Technology and Applications   8 Jul 2014   
High Resolution Imaging Mass with Focused Ar Cluster Beam
J. Matsuo, S. Torii, K. Yamauchi, K. Wakamoto, M. Kusakari, S. Nakagawa, M. Fujii, T. Aoki, T. Seki
The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16)   20 Jun 2014   
Organic Materials Analysis Using Different Primary Bi Ions in TOF-SIMS
R. Shishido, M. Fujii, T. Seki, T. Aoki, J. Matsuo, S. Suzuki
The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16)   19 Jun 2014   
Highly Sensitive Lipid Analysis and Imaging Mass Spectrometry with Cluster SIMS Apparatus
M. Fujii, R. Shishido, S. Torii, S. Nakagawa, T. Seki, T. Aoki, S. Suzuki, J. Matsuo
The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16)   19 Jun 2014   
Possibilities and Limitations of Biological Analysis with novel Ar-GCIB SIMS Apparatus
M. Fujii, S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16)   19 Jun 2014   
Study of multiple collision effects in cluster impact by molecular dynamics simulations [Invited]
Takaaki Aoki
The Conference on Application of Accelerators in Research and Industry (CAARI2014)   28 May 2014   
Possibilities and Limitations of MeV-SIMS for Biological Applications [Invited]
Makiko Fujii, Masakazu Kusakari, Toshio Seki, Takaaki Aoki, Jiro Matsuo
The Conference on Application of Accelerators in Research and Industry (CAARI2014)   26 May 2014   
Lipid Compounds Analysis with Argon Gas Cluster Ion Beam Irradiation
M. Fujii, S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
The Conference on Application of Accelerators in Research and Industry (CAARI2014)   26 May 2014   
Si Etching with ClF3 Neutral Cluster Beam from Multi-nozzle
T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki, J. Matsuo
23rd Annual Meeting of MRS-J   10 Dec 2013   
Low Vacuum SIMS Measurement of Higher Alcohols with MeV-energy Heavy Ion Beam
M. Kusakari, M. Fujii, T. Seki, T. Aoki, J. Matsuo
23rd Annual Meeting of MRS-J   10 Dec 2013   
Computer simulation of cluster impact on soft- and hard- material interface
T. Aoki, T. Seki, J. Matsuo
23rd Annual Meeting of MRS-J   10 Dec 2013   
Lipid Compounds Analysis with Swift Heavy Ion Beam for Biological Applications,
M. Fujii, M. Kusakari, T. Seki, T. Aoki, J. Matsuo
23rd Annual Meeting of MRS-J   10 Dec 2013   
Depth analysis of organic matelial by SIMS, using gas cluster ion beam
S. Nakagawa, M. Kusakari, M. Fujii, T. Seki, T. Aoki, J. Matsuo
23rd Annual Meeting of MRS-J   10 Dec 2013   
Ambient Analysis with Wet-SIMS
M. Fujii, S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
9th International Symposium on Atomic Level Characterizations for New Materials and Devices '13   2 Dec 2013   
Lipid Compounds Analysis with MeV-SIMS Apparatus for Biological Applications
M. Fujii, M. Kusakari, T. Seki, T. Aoki, J. Matsuo
2nd Workshop on Strategic Japanese-Croatian Cooperative Program   15 Nov 2013   
Introduction to computer simulation programs for atomic collision
T. Aoki
2nd Workshop on Strategic Japanese-Croatian Cooperative Program   14 Nov 2013   
Analysis of liquid materials with Wet-SIMS
T. Seki, M. Fujii, M. Kusakari1, S. Nakagawa, T. Aoki, J. Matsuo
2nd Workshop on Strategic Japanese-Croatian Cooperative Program   14 Nov 2013   
Mass Imaging of Biological Samples with Focused Massive Ar Cluster Ion Beams
S. Nakagawa, M. Fujii, T. Aoki, T. Seki, J. Matsuo
AVS 60th International Symposium & Exhibition   28 Oct 2013   
Depth analysis of DSPC by SIMS, using gas cluster ion beam
S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry   3 Oct 2013   
Possibilities and Limitations of Ar GCIB SIMS for Biological Applications
M. Fujii, S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry   3 Oct 2013   
Liquid Sample Measurements using Wet SIMS Apparatus with Swift Heavy Ion Beam
M. Fujii, M. Kusakari, T. Seki, T. Aoki, J. Matsuo
SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry   3 Oct 2013   
Generation of Ar cluster ion beam for high spatial resolution SIMS
S. Torii, T. Seki, T. Aoki, J. Matsuo
SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry   3 Oct 2013   
Secondary Ion Mass Spectrometry with Methanol Cluster Ions
S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry   1 Oct 2013   
Chemical Reaction on the Specimen Surface by Cluster Ion Beam Irradiation
M. Fujii, T. Seki, T. Aoki, J. Matsuo
2013 JSAP-MRS Joint Symposia   9 Sep 2013   
Molecular ion imaging with swift heavy ions [Invited]
Jiro Matsuo, Shunichiro Nakagawa, Makiko Fujii, Toshio Seki, Takaaki Aoki
The 17th International Conference on Radiation Effects in Insulators (REI-17)   3 Jul 2013   
Bio-imaging with MeV-energy heavy ion beams [Invited]
Toshio Seki, Sho Shitomoto, Shunichiro Nakagawa, Takaaki Aoki, Jiro Matsuo
The 21st International Conference on Ion Beam Analysis (IBA 2013)   24 Jun 2013   
Development of MeV-SIMS imaging system with electrostatic quadrupole lens
T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki, J. Matsuo
The 15th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-15)   26 Apr 2013   
Study on the Sputtering Mechanism of Amino Acid with Ar Cluster Ion Beam Irradiation
M. Fujii, H. Gnaser, S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
The 15th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-15)   25 Apr 2013   
Effects of cluster ion beam irradiation with a mixture of noble and reactive gases on inorganic solids
S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
The 15th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-15)   25 Apr 2013   
Ultra-file particle removal using Gas cluster beam technology
K. Inai, K. Dobashi, M. Saito, T.Seki, T. Aoki, J. Matsuo
International Symposium on Semiconductor Manufactureing 2012   15 Oct 2012   
Radiation Effects and Applications of Slow Heavy Particles [Invited]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
International conference on Swift Heavy Ions in Materials Engineering and Characterization   9 Oct 2012   
High-speed Processing with ClF3 Cluster Injection
T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki, J. Matsuo
IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)   23 Sep 2012   
Development of Electrostatic Quadrupole Lens for MeV-SIMS Imaging
S. Shitomoto, T. Seki, T. Aoki, J. Matsuo
IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)   23 Sep 2012   
Etching of Si by Methanol Gas Cluster Ion Beam Irradiation
S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)   23 Sep 2012   
Photoinduced Ultrafast Phase Transition in VO2 Crystal: Atomic Motion of Vanadium
J. Matsuo, M. Hada, Y. Hontani, T. Seki, T. Aoki
IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)   23 Sep 2012   
Ultrafast Molecule Dymanics of Photochromic Reaction in Diarylethene
Y. Hontani, M. Hada, T. Aoki, T. Seki, J. Matsuo
IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)   23 Sep 2012   
Bio-imaging with Swift Heavy Ion Beams
T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki, J. Matsuo
19th International Mass Spectrometry Conference   15 Sep 2012   
Molecular Imaging of Cells and Tissues with Continuous Cluster Ion Beams
J. Matsuo, T. Aoki, T. Seki
19th International Mass Spectrometry Conference   15 Sep 2012   
Secondary Ion Emission with Methanol Gas Cluster Ion Beam Irradiation
S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
19th International Mass Spectrometry Conference   15 Sep 2012   
Development of Electrostatic Quadrupole Lens for MeV-SIMS Imaging
S. Shitomoto, T. Seki, T. Aoki, J. Matsuo
19th International Mass Spectrometry Conference   15 Sep 2012   
MD Simulations of Atomic, Molecular and Cluster Impact, from X1 to X1000000 [Invited]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
18th international conference on ion beam modification of materials   2 Sep 2012   
Development of MeV-SIMS imaging system with Electrostatic Quadrupole Lens [Invited]
Toshio Seki, Sho Shitomoto, Shunichiro Nakagawa, Takaaki Aoki, Jiro Matsuo
22nd International Conference on the Application of Accelerators in Research & Industry   5 Aug 2012   
Molecular Imaging with Focused Cluster Ion Beams [Invited]
Jiro Matsuo, Shunichiro Nakagawa, Matthiew Py, Takaaki Aoki, Toshio Seki
22nd International Conference on the Application of Accelerators in Research & Industry   5 Aug 2012   
An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS
T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki, J. Matsuo
13th International Conference On Nuclear Microprobe Technology & Applications (ICNMTA2012)   26 Jul 2012   
MeV-SIMS with Swift Heavy Ion Beams toward Molecular
J. Matsuo, S. Shitomoto, S. Nakagawa, T. Aoki, T. Seki
13th International Conference On Nuclear Microprobe Technology & Applications (ICNMTA2012)   26 Jul 2012   
Concurrent job control of simulations for iterative radiation and post processing
T. Aoki, T. Seki, J. Matsuo
11th International Conference on Computer Simulations of Radiation Effects in Solids   24 Jun 2012   
Evaluation of sputtering and damage with huge cluster impact using molecular dynamics simulations
T. Aoki, T. Seki, J. Matsuo
11th International Conference on Computer Simulations of Radiation Effects in Solids   24 Jun 2012   
An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS
T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki, J. Matsuo
The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-14)   1 Jun 2012   
Large-scale MD Simulation of Huge Cluster Impact for Surface Process and Analysis [Invited]
Takaaki Aoki, Toshio Seki, Jiro Matsuo
The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions   31 May 2012   
Boron concentration measurement in cultivated cells with Nano-SIMS
M. Py, M. Takeuchi, T. Seki, T. Aoki, J. Matsuo
The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-14)   31 May 2012   
Mass Imaging with Cluster Ion Beams
J. Matsuo, S. Nakagawa, M. Py. K. Ichiki, T. Aoki, T. Seki
The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-14)   31 May 2012   
A Novel Imaging Technique for Cells and Tissue by Energetic Particle Bombardment
J. Matsuo, K. Ichiki, T. Aoki, T. Seki
2012 MRS Spring Meetings   10 Apr 2012   
Real-time Observation of Photo-induced Phase Transition of Diarylethene
Y. Hontani, M. Hada, T. Seki, T. Aoki, J. Matsuo
2012 MRS Spring Meetings   10 Apr 2012   
Time-resolved Observation of the Photoinduced Phase Transition of Diarylethene
Y. Hontani, M. Hada, T. Seki, T. Aoki, J. Matsuo
Banff Meeting on Structural Dynamics Ultrafast Dynamics with Xrays and Electrons   19 Feb 2012   
Sample Preparation for Femtosecond Electron Diffraction: Low Damage Milling of Organic Materials with Cluster Ion Beams
M. Hada, J. Hirscht, D. Zhang, K. Pichugin, S. Hayes, G. Moriena, G. Sciaini, T. Seki, T. Aoki, J. Matsuo, R. J. D. Miller
Banff Meeting on Structural Dynamics Ultrafast Dynamics with Xrays and Electrons   19 Feb 2012   
Computer simulations of radiation effect by single- and cluster- ion irradiation [Invited]
Takaaki Aoki
IAEA Technical Meeting on Radiation induced defects in semiconductors and insulators (TM 40764)   4 Jul 2011   
Secondary Molecular Ion Emission with Swift Heavy Ions:A Novel Imaging Technique for Biological Applications
Jiro Matsuo, Yoshinobu Wakamatsu, Takaaki Aoki, Toshio Seki
E-MRS 2011 Spring Meeting   11 May 2011   
Computer simulation of gas cluster ion impact [Invited]
Takaaki Aoki, Jiro Matsuo
19th International Conference on Ion-Surface Interactions 2009   21 Aug 2010   
Material processing and evaluation with cluster ion beam [Invited]
Jiro Matsuo, Hideaki Yamada, Kazuya Ichiki, Masaki Hada, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki
10th International Symposium on Sputtering & Plasma Process   8 Jul 2009   
Cluster size effect on secondary ion emission [Invited]
Jiro Matsuo, Satoshi Ninomiya, Kazuya Ichiki, Yoshihiko Nakata, Takaaki Aoki, Toshio Seki
IUVSTA Workshop   23 Apr 2007   

Misc

 
瀬木 利夫, 青木 学聡, 松尾 二郎
電気学会研究会資料. OQD = The papers of technical meeting on optical and quantum devices, IEE Japan   2018(22) 29-33   Mar 2018
MATSUO Jiro, SEKI Toshio, AOKI Takaaki
Vacuum and Surface Science   61(7) 426-434   2018
<p>Recent progress of SIMS technique is reported in conjunction with novel primary ion beams and advanced mass spectrometers. Numerous applications of SIMS have been proposed and demonstrated in last decade, covering from organic semiconductors to...
MATSUO Jiro, FUJII Makiko, SEKI Toshio, AOKI Takaaki
Journal of the Vacuum Society of Japan   59(5) 113-120   2016
&emsp;Recent progress of cluster ion beam was overviewed. Various applications, such as nano-fabrication and biological material analysis, have been developed by using cluster effects, which are due to high-density and multiple collision between c...
Shishido Rie, Fujii Makiko, Seki Toshio, Aoki Takaaki, Matsuo Jiro, Suzuki Shigeru
Abstract of annual meeting of the Surface Science of Japan   35(0)    2015
一次イオンにクラスターを用いたStaticタイプのSIMSが市販化されるようになると、分析の対象が無機材料から生体材料、ポリマー材料などのソフトマテリアルへと広がった。更に、LMIGを用いた電界放射でのイオン化により、高輝度なイオンビーム照射が実現し、高空間分解能でのイメージング分析が可能になってきた。本発表では、一次イオンにBiクラスターを採用したTOF-SIMSを用いて、一次イオン種がイメージ分解能に与える影響について議論する。
FUJII MAKIKO, SEKI TOSHIO, AOKI TAKAAKI, MATSUO JIRO
Abstract of annual meeting of the Surface Science of Japan   35(0)    2015
近年、クラスターSIMS法を用いた有機材料分析が盛んに行われている。しかしながら、一般に複雑な組成や構造を持つ生体試料に対しては、その高精細な分析は未だ困難である。我々の研究グループでは、独自に作製した種々の有機モデル試料を用いて、クラスターSIMS法を用いた生体試料分析における質量分解能、空間分解能、検出限界や定量性に関する評価を行った。本発表では現在の課題と将来展望に関する議論を行う。
Matsuo Jiro, Suzuki Kanji, Kusakari Masakazu, Fujii Makiko, Aoki Takaaki, Seki Toshio
Abstract of annual meeting of the Surface Science of Japan   35(0)    2015
脂肪酸や脂質分子は、細胞膜の主要構成分子だけでなく様々なシグナル伝達物質としての役目も負っている興味深い分子である。クラスターSIMS法では多数の脂質分子イオンを同時に高感度に検出でき、その分布を可視化する分子イメージングできるという利点がある。脂質分子の高感度検出とその分子イメージングへの応用について、実サンプルの評価結果交えて議論する。
Matsuo Jiro, Nakagawa Shunichiro, Torii Souta, Fujii Makiko, Seki Toshio, Aoki Takaaki
Abstract of annual meeting of the Surface Science of Japan   33(0)    2013
<br>脂肪酸や脂質分子は、細胞膜の主要構成分子だけでなく様々なシグナル伝達物質としての役目も負っている興味深い分子である。クラスターSIMS法では多数の脂質分子イオンを同時に高感度に検出でき、その分布を可視化する分子イメージングできるという利点がある。脂質分子の高感度検出とその分子イメージングへの応用について、実サンプルの評価結果交えて議論する。
松尾 二郎, 中川 駿一郎, 志戸本 祥, 鳥居 聡太, 瀬木 利夫, 青木 学聡
Abstract of annual meeting of the Surface Science of Japan   32(0)    2012
細胞膜などで普遍的にみられる脂質薄膜をクラスターSIMS法で評価した。ソフトなイオン化法であるクラスターSIMS法は、脂質分子を壊すことなくイオン化でき、構造評価に適した手法である。また、ラットの脳切片などへの応用も示す。
Matsuo Jiro, Ichiki Kazuya, Seki Toshio, Aoki Takaaki
Abstract of annual meeting of the Surface Science of Japan   31(0) 171-171   2011
二次イオン質量分析法の持つ高い空間分解能を活かし、培養細胞や生体組織切片への応用を進めており、細胞一個を観察することが可能となっている。最新のSIMS法の生命科学への応用を、我々の研究成果を中心に実例を交えながら紹介し、高分解質量イメージング法としての今後の課題や展望について議論する。
MATSUO Jiro, SEKI Toshio, AOKI Takaaki
Journal of the Surface Science Society of Japan   31(11) 564-571   Nov 2010
Masaki Hada, Sachi Ibuki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Japanese Journal of Applied Physics   49    Jul 2010
We characterized the thickness and surface damage layer of poly(methyl metacrylate) (PMMA) organic films irradiated with Ar cluster or monomer ion beam using ellipsometry. A heavily damaged layer was detected on the surface of the PMMA film irradi...
Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Toshio Seki, Takaaki Aoki, Takaaki Aoki, Jiro Matsuol, Jiro Matsuol
Materials Research Society Symposium Proceedings   1181 135-140   May 2010
Ar cluster ions in the size range 1000-16000 atoms/cluster were irradiated onto Si substrates at incident energies of 10 and 20 keV and the sputtering yields were measured. Incident cluster ions were size-selected by using the time-of-flight (TOF)...
MATSUO Jiro, SEKI Toshio, NINOMIYA Satoshi, AOKI Takaaki
Journal of the Japan Society for Abrasive Technology   54(5) 272-275   May 2010
MATSUO Jiro, SEKI Toshio, AOKI Takaaki
Hyomen Kagaku   31(11) 564-571   2010
A brief overview for recent progress of cluster ion beams is presented in conjunction with atomistic collision dynamics, cluster size effects and nano-process developments. Unique characteristics of cluster ion beam are utilized not only for nano-...
Wakamatsu Yoshinobu, Yamada Hideaki, Ninomiya Satoshi, Seki Toshio, Aoki Takaaki, Ishihara Akihiko, Matsuo Jiro
Abstract of annual meeting of the Surface Science of Japan   30(0) 197-197   2010
高速重イオンをプローブとした二次イオン質量分析法(SIMS)は、1μm程度の面分解能で分析可能なことに加え、従来のSIMSに比較し高分子に対して高い感度での分析、および1000 Pa程度の低真空下に保持されたサンプルの分析が可能である。本発表では高速イオンによるSIMSでラットの脳組織内に含まれるリン脂質のイメージングを実施した結果を報告する。
yamamoto yasuyuki, ichiki kazuya, ninomiya satoshi, seki toshio, aoki takaaki, matsuo jirou
Abstract of annual meeting of the Surface Science of Japan   30(0) 308-308   2010
二次イオン質量分析法(SIMS)を用いた質量イメージングは工業や医学への応用が期待されている。しかし、従来の数keVのモノマーイオンを用いたSIMS分析では有機試料の分子構造を破壊してしまうという問題がある。我々は低損傷での照射が可能なクラスターイオンを用いたSIMSについて研究しており、今回の研究ではArクラスターSIMSを用いた高面分解能の質量イメージングを取得するための装置開発を行った。
Matsuo Jiro, Ichiki Kazuya, Yamamoto Yasuyuki, Wakamatsu Yoshinobu, Aoki Takaaki, Seki Toshio
Abstract of annual meeting of the Surface Science of Japan   30(0) 447-447   2010
二次イオン質量分析法を使った細胞や組織切片のイメージング技術についてのべるとともに、実際のアプリケーションに必要な問題点や課題を明らかにする。有機分子分析や質量イメージング法の実現に必要な一次イオンビームの特性、次世代のSIMSに求められているハードウェアーなどについても検討し、新しいSIMS分析法の開発状況を報告する。
Takaaki Aoki, Jiro Matsuo
Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009   131-132   Dec 2009
Damage accumulation and annihilation processes with low-energy boron implantation were studied by molecular dynamics (MD) simulation. The MD simulation of B atom accelerated with 500eV iteratively implanted into Si(100) target showed that the numb...
Jiro Matsuo, Kazuya Ichiki, Masaki Hada, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Tsutomu Nagayama, Masayasu Tanjyo
Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009   84-85   Dec 2009
Cluster ion implantation has a great potential for semiconductor manufacturing, such as ultra shallow junction formation and strain engineering of channel. Stress in Si implanted with carbon cluster ions (C7H 7) was much higher than that in Si imp...
YAMADA Hideaki, ICHIKI Kazuya, NAKATA Yoshihiko, NINOMIYA Satoshi, SEKI Toshio, AOKI Takaaki, MATSUO Jiro
Journal of the Mass Spectrometry Society of Japan   57(3) 117-121   Jun 2009
We developed a processing technique for biological samples, that is, animal cells, for imaging mass spectrometry using gas cluster ion beams. Secondary ion mass spectrometry has been investigated for cellular imaging with high spatial resolution. ...
Wakamatsu Yoshinobu, Yamada Hideaki, Nakata Yoshihiko, Ninomiya Satoshi, Seki Toshio, Aoki Takaaki, Matsuo Jiro
Abstract of annual meeting of the Surface Science of Japan   29(0) 35-35   2009
近年、生体試料における質量イメージング技術の発展が期待されている。SIMSは高真空下での分析手法であるが、高速重イオンをプローブとすることにより低真空下でのSIMSに成功した。本発表では、数千Pa程度の低真空下で質量イメージングを行うための分析系の開発とその結果について報告する。
Takaaki Aoki, Toshio Seki, Jiro Matsuo
IWJT-2008 - Extended Abstracts 2008 International Workshop on Junction Technology   49-54   Sep 2008
By the recent development of high-performance computing, molecular dynamics method has been a powerful technique for analyzing collisions between cluster and solid target system. In this paper, molecular dynamics simulations of various kinds of cl...
NAKATA Yoshihiko, YAMADA Hideaki, HONDA Yoshiro, NINOMIYA Satoshi, SEKI Toshio, AOKI Takaaki, MATSUO Jiro
Journal of the Mass Spectrometry Society of Japan   56(4) 201-208   Aug 2008
In this paper, we describe mass spectrometric techniques using swift heavy ions, for biological application. Desorption of large biomolecular ions due to irradiation by swift heavy ions was first observed in 1974, and the time-of-flight mass spect...
HIKATA Takeshi, HAYASHI Kazuhiko, MIZUKOSHI Tomoyuki, SAKURAI Yoshiaki, ISHIGAMI Itsuo, AOKI Takaaki, SEKI Toshio, MATSUO Jiro
Applied physics express   1(3) "34002-1"-"34002-3"   Mar 2008
Takeshi Hikata, Kazuhiko Hayashi, Tomoyuki Mizukoshi, Yoshiaki Sakurai, Itsuo Ishigami, Takaaki Aoki, Toshio Seki, Jiro Matsuo
Applied Physics Express   1 0340021-0340023   Mar 2008
We have fabricated carbon nanotubes (CNTs) using a catalyzed growth technique that we call the carbon transmission method (CTM). We could control independently functions for carbon source gas supply and CNT growth by using a foil barrier (Ag) pene...
Nakata Y., Honda Y., Ninomiya S., Seki T., Aoki T., Matsuo J.
Meeting Abstracts of the Physical Society of Japan   63(0)    2008
Ninomiya S., Ichiki K., Nakata Y., Seki T., Aoki T., Matsuo J.
Meeting Abstracts of the Physical Society of Japan   63(0)    2008
Matsuo Jiro, Ninomiya Satoshi, Aoki Takaaki, Seki Toshio
Journal of Surface Analysis   14(3) 196-203   2008
<p>  "Non-linear Effect" is one of the unique phenomena in cluster ion impacts, where many atoms are collided each other instantaneously. Novel techniques for Nano-Processing and material analysis have been developed in the last decade, and will g...
青木 学聡, Seki Toshio, Matsuo Jiro
Annual report of Ion Beam Engineering Laboratory, University of Hyogo   2008 224-227   2008
瀬木 利夫, Aoki Takaaki, Matsuo Jiro
Annual report of Ion Beam Engineering Laboratory, University of Hyogo   2008 259-264   2008
Takaaki Aoki, Toshio Seki, Jiro Matsuo
Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007   23-24   Dec 2007
The MD simulations of B monomer and small cluster implantation were performed. The non-linear effect for implant range was observed when the incident energy is as low as few hundreds eV/atom, where the B10 or B18 cluster implantation gives deeper ...
Jiro Matsuo, Takaaki Aoki, Toshio Seki
Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007   53-54   Dec 2007
More than ten years have passed since cluster ion implantation was proposed by Kyoto University. Cluster ion implanters equipped with a specially designed ion source are announced for device manufacturing. This technique is now a candidate for ult...
Ninomiya S., Ichiki K., Nakata Y., Seki T., Aoki T., Matsuo J.
Meeting Abstracts of the Physical Society of Japan   62(0)    2007
Ninomiya S., Aoki T., Seki T., Nakata Y., Ichiki K., Matsuo J.
Meeting Abstracts of the Physical Society of Japan   61(0)    2006
Ninomiya S., Ichiki K., Nakata Y., Seki T., Aoki T., Matsuo J.
Meeting Abstracts of the Physical Society of Japan   61(0)    2006
Ninomiya Satoshi, Ichiki Kazuya, Nakata Yoshihiko, Seki Toshio, Aoki Takaaki, Matsuo Jiro
Abstract of annual meeting of the Surface Science of Japan   26(0) 106-106   2006
クラスターイオンをプローブとする有機物の二次イオン質量分析は、単原子イオンと比較して収率が高く試料の損傷も少ない。しかしクラスター照射での収率増加機構や最大収率を与えるための入射サイズの最適化については、ほとんど研究されていない。そこで本研究ではサイズ選別したArクラスターをアミノ酸薄膜に照射し、二次イオンを飛行時間型質量分析法を用いて測定することにより収率の入射サイズ依存性について調べた。
Ichiki Kazuya, Ninomiya Satoshi, Seki Toshio, Aoki Takaaki, Matsuo Jiro
Abstract of annual meeting of the Surface Science of Japan   26(0) 108-108   2006
クラスターイオンは単原子イオンと比較して、低速で高エネルギー密度での照射が容易であるため、高精度かつ高効率な表面分析、表面改質が可能とされている。しかし、クラスターと固体表面との相互作用は十分に理解されていない。よって本研究では、クラスターイオン照射によりSi試料から放出される二次イオン収率の入射サイズ依存性を飛行時間型質量分析法を用いて分析し、クラスター照射効果について考察する。
Takaaki Aoki, Takaaki Aoki, Jiro Matsuo, Isao Yamada, Isao Yamada
Novel Materials Processing by Advanced Electromagnetic Energy Sources   231-234   Dec 2005
This chapter discusses the surface structure dependence of impact processes of gas cluster ions. The surface modification processes utilizing the impact of large cluster ions is also proposed. One of the unique properties of cluster ion impact is ...
N. Toyoda, S. Houzumi, T. Aoki, I. Yamada
Novel Materials Processing by Advanced Electromagnetic Energy Sources   219-222   Dec 2005
This chapter reveals the experimental study of cluster size effect with size-selected cluster ion beam. A size-selected gas cluster ion beam (GCIB) system is developed to study the size effects of energetic large cluster ion bombardments on a soli...
L. K. Ono, T. Aoki, T. Aoki, T. Seki, T. Seki, J. Matsuo, A. Itoh
Novel Materials Processing by Advanced Electromagnetic Energy Sources   227-230   Dec 2005
This chapter discusses the gas cluster ion beam source for secondary ion emission measurements. When solids are bombarded with cluster ions, collision cascades induced by individual constituent atoms of the cluster overlap each other. Energy densi...
Takaaki Aoki, Jiro Matsuo
Materials Research Society Symposium Proceedings   908 18-24   Dec 2005
To investigate the size-effect of reactive clusters on sputtering processes, we performed molecular dynamics (MD) simulations of reactive cluster ions with various sizes impacting on solid targets. Various sizes of fluorine clusters, (F2)30, (F2)3...
Shigeru Kakuta, Shigeru Kakuta, Toshio Seki, Toshio Seki, Shinji Sasaki, Shinji Sasaki, Kenji Furusawa, Kenji Furusawa, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo
Surface and Coatings Technology   196 198-202   Jun 2005
Energy resolved time of flight (ERTOF) mass spectroscopy has been developed to measure the energy and size distributions in a gas cluster ion beam (GCIB). Gas cluster ions, being aggregates of a few to several thousands of atoms, were generated by...
Shigeru Kakuta, Shigeru Kakuta, Shinji Sasaki, Shinji Sasaki, Kenji Furusawa, Kenji Furusawa, Toshio Seki, Takaaki Aoki, Jiro Matsuo
Materials Research Society Symposium Proceedings   843 183-188   Jun 2005
Oblique irradiation using a gas cluster ion beam (GCIB) has been studied in order to achieve low-damage smoothing of magnetic materials. We investigated how the surface morphology and surface roughness depended on the angle of incidence. Quite smo...
Satoshi Ninomiya, Chikage Imada, Masafumi Nagai, Yoshihiko Nakata, Takaaki Aoki, Jiro Matsuo, Nobutsugu Imanishi
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   230 483-488   Apr 2005
Total sputtering yields have been measured for SiO2 and Cu targets bombarded with Si ions at an incident energy between 500 keV and 5.0 MeV using a quartz crystal microbalance technique. In order to measure total yields accurately, we have develop...
Yoshihiko Nakata, Satoshi Ninomiya, Chikage Imada, Masafumi Nagai, Takaaki Aoki, Jiro Matsuo, Nobutsugu Imanishi
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   230 489-494   Apr 2005
We have measured both secondary neutral and ionized particles from an InSb target under 3.0 MeV Si ion bombardment. Measurements of both ions and neutrals have not been carried out so far in the MeV-energy range. The mass spectra and axial emissio...
Takaaki Aoki, Takaaki Aoki, Jiro Matsuo
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   228 46-50   Jan 2005
Molecular dynamics (MD) simulations of cluster and solid target collisions were performed in order to understand the relationship between surface deformation processes and cluster sizes. MD simulations of single impacts of clusters with various si...
Ninomiya S., Nakata Y., Aoki T., Matsuo J., Ito A.
Meeting Abstracts of the Physical Society of Japan   60(0)    2005
Nakata Y., Ninomiya S., Aoki T., Tsuchida H., Matsuo J., Itoh A.
Meeting Abstracts of the Physical Society of Japan   60(0)    2005
Ninomiya S., Aoki T., Seki T., Matsuo J.
Meeting Abstracts of the Physical Society of Japan   60(0)    2005
Nakata Y., Ninomiya S., Aoki T., Tsuchida H., Matsuo J., Itoh A.
Meeting Abstracts of the Physical Society of Japan   60(0)    2005
Takaaki Aoki, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   216 185-190   Feb 2004
Molecular dynamics (MD) simulations of Ar cluster impacts on Si surfaces were performed in order to examine the evolution of surface morphology with cluster irradiations. The MD results revealed that the impact process of cluster is different depe...
Ninomiya S., Nakata Y., Aoki T., Matsuo J, Itoh A.
Meeting Abstracts of the Physical Society of Japan   59(0)    2004
Takaaki Aoki, Takaaki Aoki, Jiro Matsuo, Isao Yamada, Isao Yamada
Materials Research Society Symposium - Proceedings   792 497-502   Dec 2003
In order to understand the characteristics of surface modification process with cluster ion irradiation, molecular dynamics simulations of Ar cluster impacting on Si surface with various surface structures were carried out. It was found that the s...
Shigeru Kakuta, Shigeru Kakuta, Toshio Seki, Toshio Seki, Shinji Sasaki, Shinji Sasaki, Kenji Furusawa, Kenji Furusawa, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo
Materials Research Society Symposium - Proceedings   792 599-604   Dec 2003
Ar penetration during gas cluster ion beam (GCIB) irradiation has been investigated using secondary ion mass spectroscopy (SIMS). The concentration of Ar rose to a maximum and then decreased gradually with increasing depth. The depth of the Ar pen...
Noriaki Toyoda, Shingo Houzumi, Takaaki Aoki, Isao Yamada
Materials Research Society Symposium - Proceedings   792 623-628   Dec 2003
A size-selected gas cluster ion beam (GCIB) system has been developed to study the size effects of energetic large cluster ion bombardments on a solid surface for the first time. This system equipped a permanent magnet with a magnetic flux density...
A. Nakai, T. Aoki, T. Seki, J. Matsuo, G. H. Takaoka, I. Yamada
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   206 842-845   May 2003
Smoothing effect is one of the advantages of cluster ion beam. It is important to estimate an ion dose to achieve required surface smoothness. The smoothing rate with cluster ion beam depends on surface profiles. In this work, modeling of surface ...
Jiro Matsuo, Toshio Seki, Takaaki Aoki, Isao Yamada
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   206 838-841   May 2003
New surface modification processes have been demonstrated using gas cluster ion irradiations, because of the unique interaction between cluster ions and surface atoms, atomistic mechanisms of cluster ion bombardment must be understood for the furt...
Takaaki Aoki, Takaaki Aoki, Jiro Matsuo, Gikan Takaoka, Isao Yamada, Isao Yamada
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms   206 861-865   May 2003
Molecular dynamics simulations of Ne, Ar and Xe clusters with various sizes impacting on Si surfaces were performed in order to study damage formation processes. When cluster size ranged from several tens to several thousands and accelerated energ...
Noriaki Toyoda, Jiro Matsuo, Takaaki Aoki, Isao Yamada, David B. Fenner
Applied Surface Science   203-204 214-218   Jan 2003
Secondary ion mass spectrometry (SIMS) with gas cluster ion beams (GCIB) was studied with experiments and molecular dynamics (MD) simulations to achieve a high-resolution depth profiling. From MD simulations of Ar cluster ion impact on a Si substr...
AOKI Takaaki, MATSUO Jiro, TAKAOKA Gikan
Technical report of IEICE. SDM   102(540) 25-28   Dec 2002
Low energy ion implantation with several hundreds eV of implant energy is one of the important technique for advanced CMOS device fabrication. As the incident energy decreases and the implant range of dopants is reduced, various problems such like...
Takaaki Aoki, Takaaki Aoki, Jiro Matsuo, Gikan Takaoka
Proceedings of the International Conference on Ion Implantation Technology   22-27-September-2002 560-563   Jan 2002
© 2002 IEEE.Cluster ion implantation using small boron cluster, decaborane (B10H14), has been proposed as the solution for shallow junction formation. Investigation of damage formation process by low-energy ion impact is important issue because di...
CHIBA Shun-ichi, AOKI Takaaki, MATSUO Jiro, TAKAOKA Gikan
Technical report of IEICE. SDM   100(517) 23-28   Dec 2000
Formation of precursors and desorption of etching products by fluorine ion irradiation were studied using molecular dynamics simulation. When F atoms impact sequentially on a Si substrate, a mixed layer of F and Si atoms is formed on the surface. ...
KUSABA T., SEKI T., AOKI T., MATSUO J., KASE M., GOTO K., SUGII T., YAMADA I.
Technical report of IEICE. SDM   98(445) 97-104   Dec 1998
It is discussed that damage formation and enhanced diffusion by decaborane ion implantation. In the case of 900℃ annealing, TED was suppressed as the implant energy decreased. During annealing at 900°, 950℃ and 1000℃, the diffusion of boron atoms ...
YAMADA Isao, MATSUO Jiro, TOYODA Noriaki, AOKI Takkaki
Shinku   41(11) 932-939   Nov 1998
YAMADA Isao, MATSUO Jiro, TOYODA Noriaki, AOKI Takaaki, INSEPOV Zinetulla
Journal of the Surface Science Society of Japan   18(12) 743-751   Dec 1997
YAMADA Isao, MATSUO Jiro, TOYODA Noriaki, AOKI Takaaki
電気学会研究会資料. MC, 金属・セラミックス研究会   1997(1) 27-34   Nov 1997
YAMADA Isao, MATSUO Jiro, TOYODA Noriaki, AOKI Takaaki, INSEPOV Zinetulla
Hyomen Kagaku   18(12) 743-751   1997
Sputtering with gas cluster ions, which are aggregates of a few thousands of atoms, has been investigated experimentally and theoretically. Cluster ion beam etching is equivalent to low-energy high-current ion etchings with very low damage. Intere...
AOKI T., SHIMADA N., TAKEUCHI D., MATSUO J., INSEPOV Z., YAMADA I.
Technical report of IEICE. SDM   96(396) 49-54   Dec 1996
Cluster consists of several tens to thousands atoms/molecules, and cluster ion beam technique provides equivalent low-energy ion irradiation. The implant profile by B_<13> cluster, with the energy of 230eV/atom, is same as one by the B monomer whi...

Research Grants & Projects

 
"Research of Time- and Space- Scalable Atomistic Simulation", commited by MEXT under "Innovative Nuclear Research and Development Program"
Nuclear and Atomic Science Research
Project Year: 2005 - 2008