Satoru Takahashi

J-GLOBAL         Last updated: Apr 29, 2019 at 13:43
 
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Name
Satoru Takahashi
E-mail
takahashinanolab.t.u-tokyo.ac.jp
Affiliation
The University of Tokyo
Section
Research Center for Advanced Science and Technology
Research funding number
30283724

Research Areas

 
 

Awards & Honors

 
Nov 2018
Best Paper Award, ICPE2018
 
Sep 2017
Best Paper Award 2017, ISMTII2017
 
Sep 2014
Excellent Paper Award, 11th IMEKO Symposium LMPMI2014
 

Published Papers

 
Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota
Journal of Micro/ Nanolithography, MEMS, and MOEMS   17    Oct 2018
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE). Line edge roughness (LER) and linewidth roughness (LWR) of a semiconductor device are important measures for evaluating its performance. Conventionally, LER and LWR have been evalua...
Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
Precision Engineering   54 353-360   Oct 2018
© 2018 Elsevier Inc. Biomimetic micro-structured surfaces have been attracting attention in recent years owing to their features, including optical reactivity, wetting property, and sliding property. One of the typical features of these functional...
Ye Shiwei, Takahashi Satoru, Michihata Masaki, Takamasu Kiyoshi
MEASUREMENT SCIENCE AND TECHNOLOGY   29(5)    May 2018   [Refereed]
Winarno Agustinus, Masuda Shusei, Takahashi Satoru, Matsumoto Hirokazu, Takamasu Kiyoshi
MEASUREMENT SCIENCE AND TECHNOLOGY   29(2)    Feb 2018   [Refereed]
MICHIHATA Masaki, CHU Bohuai, ZHAO Zheng, HAYASHI Kohei, TAKAMASU Kiyoshi, TAKAHASHI Satoru
Journal of the Japan Society for Precision Engineering   84(1) 77-84   Jan 2018
In this study it is proposed the new measurement method of diameter for a microsphere based on whispering gallery mode (WGM) resonances. WGMs are the light propagation mode, which is occurred inside a spherical shape. Diameter is estimated based o...
Takamasu Kiyoshi, Takahashi Satoru, Kawada Hiroki, Ikota Masami
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXII   10585    2018   [Refereed]
Kong Deqing, Michihata Masaki, Takamasu Kiyoshi, Takahashi Satoshi
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   31(3) 441-446   2018   [Refereed]
Michihata Masaki, Ueda Shin-Ichi, Takahashi Satoru, Takamasu Kiyoshi, Takaya Yasuhiro
OPTICAL ENGINEERING   56(6)    Jun 2017   [Refereed]
Satoru Takahashi, Yuki Shimizu, Yasuhiro Mizutani
International Journal of Automation Technology   11 681   Jan 2017
S. Takahashi, C. Jin, S. Ye, M. Michihata, K. Takamasu
CIRP Annals - Manufacturing Technology   66 503-506   Jan 2017
© 2017 We propose a novel optical measurement method, allowing an in-process depth evaluation of microgrooves, width of which is less than the half of wavelength, with aspect ratio larger than 1, based on near-field optical phase response form the...

Misc

 
HIRATA Fumihiko, TATSUNO Yasufumi, TAKAHASHI Satoru, TAKAYA Yasuhiro, MIYOSHI Takashi
42(2) 85-86   Feb 1998
Yasuhiro Takaya, Kazuhiro Wake, Motoki Izukura, Satoru Takahashi, Takashi Miyoshi
Proceedings of SPIE - The International Society for Optical Engineering   3520 170-179   Dec 1998
As the micromachining techniques are developed, in-process measurement and evaluation technique for the three-dimensional micro-profile in the microparts production system are required. In this paper, we propose a new optical measuring method whic...
HAYASHI Terutake, MIYOSHI Takashi, TAKAYA Yasuhiro, TAKAHASHI Satoru
2000(3) 507-508   Jul 2000
This paper describe a new application of stereolithography using LCD mask. Rapid Prototyping (RP) has been developed as the key manufacturing process for fabricating solid model from a computer aided design (CAD). In this paper, we propose a new R...
TAKAYA Yasuhiro, LEE Seojoon, TAKAHASHI Satoru, MIYOSHI Takashi
2000(3) 541-542   Jul 2000
This paper describes the efficient measuring method of 3-D edge profile with high accuracy for free form surface including die and mould model shapes. We propose a new method of the 3-D edge profile measurement technique by means of optical ring i...
TAKAYA Yasuhiro, UEKITA Masahiro, TAKAHASHI Satoru, MIYOSHI Takashi
The ... Manufacturing & Machine Tool Conference   2000(2) 203-204   Nov 2000
We have been developing the new probe technique for the nano-CMM, that is called the laser trapping probe whose principle is based on single-beam gradient-force optical trapping techniques and microscope interferometers. The work reported in this ...
Satoru Takahashi, Takashi Miyoshi, Yasuhiro Takaya
American Society of Mechanical Engineers, Manufacturing Engineering Division, MED   11 209-214   Dec 2000
A new optical measurement method for evaluating the defects on silicon wafer surfaces quantitatively, applicable to inprocess measurement, is presented. The experimental system for measuring the defects consists of a Fourier transform optical syst...
Y. Takaya, A. Taguchi, S. Takahashi, T. Miyoshi
Proceedings of SPIE - The International Society for Optical Engineering   4222 44-47   Dec 2000
The three-dimensional (3-D) laser inverse scattering phase method offers the advantage of measuring a 3-D microprofile within the whole area illuminated by laser beam at one time. No scanning process is required as you see in SPM (Scanning Probe M...
TAKAYA Yasuhiro, HAYASHI Terutake, TAKAHASHI Satoru, MIYOSHI Takashi
0(1) 15-16   Aug 2001
In this paper, we propose a new stereolithography process using a thin film transistor (TFT) liquid crystal display (LCD) mask. Simultaneous exposure based on dynamically controlled cure process enables precise fabrication of 3D structures with th...
PANART Khajornrungruang, MIYOSHI Takashi, TAKAYA Yasuhiro, TAKAHASHI Satoru, HARADA Takashi, ISAGO Soichiro
The ... Manufacturing & Machine Tool Conference   2001(3) 105-106   Nov 2001
This paper will propose a new approach to measure deformation, flank wear on micro diameter tool cutting edge. In other words, we can evaluate the change of cutter diameter. Furthermore, due to this approach bases on applied laser diffraction, it ...
A. Taguchi, T. Miyoshi, Y. Takaya, S. Takahashi
Proceedings of SPIE - The International Society for Optical Engineering   4900 739-746   Jan 2002
Measurement techniques of processed micro surface profiles have been increasingly required in the production of microstructures. Especially the demands on evaluating the dimensional characteristics of microstructure components by in-situ and in-pr...

Conference Activities & Talks

 
New developments for next-generation precision engineering opened with localized light energy control [Invited]
Satoru Takahashi
Nov 2017   
Challenge of Spatial Resolution Improvement of Optical Measurement Method Based on Localized Light Energy [Invited]
Satoru Takahashi
Sep 2015