2019年4月
Spectroscopic interferometer with a large length range by rotating diffraction grating
Optics Express
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- 巻
- 27
- 号
- 8
- 開始ページ
- 10553
- 終了ページ
- 10563
- 記述言語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1364/OE.27.010554
© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement A new method for spectroscopic interferometry using rotating diffraction grating was developed for industrial measurements. Two diffraction gratings increase the spectroscopic resolution, and the effective measuring range can be extended considerably. Instead of calibrating the wavelength, we used the Fabry−Perot Etalon (standard) to calibrate the system and determine the absolute position. The rotation diffraction gratings may also be used as a spectroscopic element over extensive ranges for low-cost and high-speed measurement. Our experiments indicate a length range of approximately 4.00 mm with repeatability of 0.17μm (0.0167%) for the narrow range and 3.84 μm (0.0955%) for the wide range.
- リンク情報
- ID情報
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- DOI : 10.1364/OE.27.010554
- eISSN : 1094-4087
- ORCIDのPut Code : 82202372
- PubMed ID : 31052912
- SCOPUS ID : 85064454130