© 2019 European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. All rights reserved. Although optical measurement would be useful for micro-structured surface inspection, the resolution is limited by diffraction. Structured Illumination Microscopy (SIM) is a super-resolution technique, which has been developed for fluorescent observation. This technique, however, premises incoherent imaging systems and application to coherent systems including semiconductor defect inspection has not been realized. We propose a coherent super-resolution method based on SIM. To obtain relative phases of field on images which are indispensable for coherent systems, we exploit a characteristic of standing wave illumination. Simulation results show the theoretical validity of the proposed method.