2009年11月20日
フッ素固定式パーフルオロ化合物(PFCs)除害システム
真空
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- 巻
- 52
- 号
- 11
- 開始ページ
- 624
- 終了ページ
- 628
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.3131/jvsj2.52.624
- 出版者・発行元
- 日本真空協会
In order to minimize contributions to global warming, it is important to develop a Perfluorocompounds (PFCs) abatement system that can remove PFCs effectively with low electric power. We have developed a new PFCs abatement system consisting mainly of a 2 MHz ICP plasma source and two CaO columns operated at low pressure. The CaO agent developed for this system has a specific surface area of 60-80 m2/g and a grain diameter of 2-6 mm, simultaneously. Reactive fluorinated compounds are immobilized in the CaO columns without a water scrubber to prevent the recombination of fluorocarbons. Stab...
- リンク情報
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- DOI
- https://doi.org/10.3131/jvsj2.52.624
- CiNii Articles
- http://ci.nii.ac.jp/naid/10026292014
- CiNii Books
- http://ci.nii.ac.jp/ncid/AN00119871
- ID情報
-
- DOI : 10.3131/jvsj2.52.624
- ISSN : 1882-2398
- CiNii Articles ID : 10026292014
- CiNii Books ID : AN00119871