Takashi Hamano

Profile Information

Affiliation: Graduate School of Engineering, Department of Aeronautics and Astronautics, Kyoto University

Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Takashi Hamano, Takayuki Matsuda, Yuya Asamoto, Masao Noma, Shigehiko Hasegawa, Michiru Yamashita, Keiichiro Urabe, Koji Eriguchi

Applied Physics Letters, 120(3) 031904-031904, Jan 17, 2022 Peer-reviewedLead author
Improvement of the plasma‐induced defect generation model in Si substrates and the optimization design framework

Koji Eriguchi, Takashi Hamano, Keiichiro Urabe

Plasma Processes and Polymers, 16(9) 1900058-1900058, Sep, 2019 Peer-reviewed
Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance–voltage characteristics

Takashi Hamano, Keiichiro Urabe, Koji Eriguchi

Journal of Physics D: Applied Physics, Jul 25, 2019 Peer-reviewedLead author
Incident ion dose evolution of damaged layer thickness in Si substrate exposed to Ar and He plasmas

Takashi Hamano, Koji Eriguchi

Japanese Journal of Applied Physics, 57(6S2) 06JD02-06JD02, Jun 1, 2018 Peer-reviewedLead author

Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique

T. Matsuda, T. Hamano, Y. Asamoto, M. Noma, M. Yamashita, S. Hasegawa, K. Urabe, K. Eriguchi

Japanese Journal of Applied Physics, 61(SI), Jul 1, 2022
Structural Design of Boron Nitride Films Using Ion-Flux Controlling Reactive Plasma-Assisted Coating (RePAC) Technique

松田崇行, 濱野誉, 朝本雄也, 野間正男, 山下満, 長谷川繁彦, 占部継一郎, 江利口浩二

応用物理学会秋季学術講演会講演予稿集(CD-ROM), 82nd, 2021
Control of Ion Flux to the Substrate in Material Processing with a Vacuum-Arc Discharge Considering Discharge Current Limitation Mechanisms

朝本雄也, 松田崇行, 濱野誉, 野間正男, 長谷川繁彦, 山下満, 占部継一郎, 江利口浩二

応用物理学会秋季学術講演会講演予稿集(CD-ROM), 82nd, 2021

A study of plasma-material atomistic-scale interactions based on stochastic theory and optimal control of material properties

Grants-in-Aid for Scientific Research Grant-in-Aid for JSPS Fellows, Grant-in-Aid for JSPS Fellows, Japan Society for the Promotion of Science, Apr, 2020 - Mar, 2023