Profile Information

Affiliation
Professor, Faculty of Science and Technology Department of Science and Technology , Seikei University
Degree
Doctor Engineering(The University of Tokyo)

Researcher number
40237342
J-GLOBAL ID
200901048314885741
researchmap Member ID
1000091733

External link

スパッタリング法を中心にした薄膜作製法、および薄膜の評価法について実験的な研究を行っています。

Papers

  43

Misc.

  32

Books and Other Publications

  9

Presentations

  11

Research Projects

  12