論文

2020年2月

MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

SENSORS
  • Thanh-Vinh Nguyen
  • ,
  • Yuya Mizuki
  • ,
  • Takuya Tsukagoshi
  • ,
  • Tomoyuki Takahata
  • ,
  • Masaaki Ichiki
  • ,
  • Isao Shimoyama

20
4
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.3390/s20041052
出版者・発行元
MDPI

This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above a vessel of a subject, the pulse wave of the subject causes the membrane to deform, leading to a change in the chamber pressure. This pressure change results in bending of the cantilever and change in the resistance of the cantilever, hence the pulse wave of the subject can be measured by monitoring the resistance of the cantilever. In this paper, we report the sensor design and fabrication, and demonstrate the measurement of the pulse wave using the fabricated sensor. Finally, measurement of the pulse wave velocity (PWV) is demonstrated by simultaneously measuring pulse waves at two points using the two fabricated sensor devices. Furthermore, the effect of breath holding on PWV is investigated. We showed that the proposed sensor can be used to continuously measure the PWV for each pulse, which indicates the possibility of using the sensor for continuous blood pressure measurement.

Web of Science ® 被引用回数 : 1

リンク情報
DOI
https://doi.org/10.3390/s20041052
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000522448600103&DestApp=WOS_CPL

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