論文

2019年6月

Electrical detection SPR sensor with grating coupled backside illumination

OPTICS EXPRESS
  • Yoshiki Saito
  • ,
  • Yosuke Yamamoto
  • ,
  • Tetsuo Kan
  • ,
  • Takuya Tsukagoshi
  • ,
  • Kentaro Noda
  • ,
  • Isao Shimoyama

27
13
開始ページ
17763
終了ページ
17770
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1364/OE.27.017763
出版者・発行元
OPTICAL SOC AMER

A current detection surface plasmon resonance (SPR) sensor with an Au grating on an n-Si wafer was proposed. SPR excitation light is illuminated from the backside of the device and diffracted by the grating. Since the diffraction provides matching conditions, SPR can be coupled to the Au/analyte interface. Since the coupled SPR excites free electrons on the Au surface, the SPR can be detected as a current signal by a Schottky barrier diode formed on the Au/n-Si interface. The obtained angular current spectrum showed clear agreement with SPR coupling theory, thereby confirming that the sample on the Au surface can be electrically detected using the proposed sensor. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Web of Science ® 被引用回数 : 3

リンク情報
DOI
https://doi.org/10.1364/OE.27.017763
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000472621000029&DestApp=WOS_CPL

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