2014年2月
Design of a new electron cyclotron resonance ion source at Oshima National College of Maritime Technology
REVIEW OF SCIENTIFIC INSTRUMENTS
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- 巻
- 85
- 号
- 2
- 開始ページ
- 02A936-1
- 終了ページ
- 3
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/1.4847235
- 出版者・発行元
- AMER INST PHYSICS
A new electron cyclotron resonance ion/plasma source has been designed and will be built at Oshima National College of Maritime Technology by early 2014. We have developed an ion source that allows the control of the plasma parameters over a wide range of electron temperatures for material research. A minimum-B magnetic field composed of axial mirror fields and radial cusp fields was designed using mainly Nd-Fe-B permanent magnets. The axial magnetic field can be varied by three solenoid coils. The apparatus has 2.45 GHz magnetron and 2.5-6.0 GHz solid-state microwave sources. (C) 2013 AIP Publishing LLC.
- リンク情報
- ID情報
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- DOI : 10.1063/1.4847235
- ISSN : 0034-6748
- eISSN : 1089-7623
- Web of Science ID : WOS:000335919900096