2019年8月
Construction of Response Function of TES X-ray Microcalorimeter for STEM-EDS
IEEE Transactions on Applied Superconductivity
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- 巻
- 29
- 号
- 5
- 開始ページ
- 1
- 終了ページ
- 4
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/TASC.2019.2902304
- 出版者・発行元
- Institute of Electrical and Electronics Engineers ({IEEE})
A quantitative microanalysis of astromaterials (e.g., meteorite, returned samples from asteroids) is a key technology to understand the history of our solar system formation. To fulfill this, we developed an energy-dispersive X-ray spectroscopy (EDS) using a transition-edge sensor (TES) microcalorimeterarray on a scanning transmission electron microscope (STEM) for material analysis. To reduce the systematic errors of a spectral analysis, we investigated and constructed the response function of the STEM-EDS system, which consists of detection efficiency and a two-dimensional response matrix. The latter represents the pulse-height redistribution functions of the incident photons of different energies. Using the constructed response function, we demonstrated the quantitative determination of SiO2 film and confirmed that the number-density ratio of oxygen to silicon (=2.29(-0.29)(+0.32)) is consistent with the expected value of 2 within the statistical errors. We further study the systematic errors of the concentration determination with simulations. We analyze the simulated spectra of TES-EDS and SDD (silicon drift detector)-EDS without a priori knowledge about the continuum spectra and find that the systematic deviations of parameters from the model values are smaller than 1% for TES-EDS and larger than 10% for SDD-EDS.
- リンク情報
- ID情報
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- DOI : 10.1109/TASC.2019.2902304
- ISSN : 1051-8223
- eISSN : 1558-2515
- ORCIDのPut Code : 66327756
- Web of Science ID : WOS:000463482700001