論文

2020年12月

Selective growth and texturing of VO2(B) thin films for high-temperature microbolometers

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
  • Tae-Hyeon Kil
  • Hyung-Jin Choi
  • Gwangyeob Lee
  • Byeong-Hyeon Lee
  • Soo Young Jung
  • Ruiguang Ning
  • Chan Park
  • Sung Ok Won
  • Hye Jung Chang
  • Won Jun Choi
  • Seung-Hyub Baek
  • 全て表示

40
15
開始ページ
5582
終了ページ
5588
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.jeurceramsoc.2020.05.052
出版者・発行元
ELSEVIER SCI LTD

Vanadium oxides exhibit a broad spectrum of physical properties due to their ability to form various compounds and polymorphs. To utilise a particular property, it is essential to selectively synthesise a desired phase. Herein, we demonstrate a method to selectively and reproducibly grow (00l)-textured VO2(B) thin films using an amorphous SrTiO3 buffer layer by sputtering at 350 degrees C, which enables their direct integration with read-outintegrated-circuits (ROICs), glass, and polymer substrates. The VO2(B) films exhibit high temperature-coefficient-of-resistances (TCRs) ( -3.5%/K at 25 degrees C and >-1.5%/K at 95 degrees C) and low electrical resistivities (similar to 5 10(-1) Omega cm at 25 degrees C and < 1 x 10(-1) Omega cm at 95 degrees C), which are favourable for realising highly-sensitive, lownoise, and high-temperature microbolometers. A robust thermal stability of these VO2(B) thin films at ambient pressure will provide new opportunities to incorporate thermal sensing functions to various electronics.

リンク情報
DOI
https://doi.org/10.1016/j.jeurceramsoc.2020.05.052
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000564251700004&DestApp=WOS_CPL
ID情報
  • DOI : 10.1016/j.jeurceramsoc.2020.05.052
  • ISSN : 0955-2219
  • eISSN : 1873-619X
  • Web of Science ID : WOS:000564251700004

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