Apr, 2016
Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm
IEEE-ASME TRANSACTIONS ON MECHATRONICS
- Volume
- 21
- Number
- 2
- First page
- 1189
- Last page
- 1192
- Language
- English
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.1109/TMECH.2015.2511782
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Actuator miniaturization to submillimeter scales encounters difficult fabrication and serious torque dissipation caused by adhesion forces. This study presents a design for micro ultrasonic motors that enables microfabrication and motor actuation. The stator prototype, which is the smallest ultrasonic motor reported to date, comprises a metallic cube with a side length of 0.5 mm and a through-hole of 0.33-mm diameter at its center, and two piezoelectric elements adhered to its sides. Under two different applied voltages, the stator generates a driving force and transfers it to the rotor inserted in the through-hole. Performance assessments show that this micromotor generates an average angular velocity of 123 rad/s and a peak torque of 0.2 mu N.m. This torque value exceeds that of the existing micromotors.
- Link information
- ID information
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- DOI : 10.1109/TMECH.2015.2511782
- ISSN : 1083-4435
- eISSN : 1941-014X
- Web of Science ID : WOS:000372368700057