Papers

Peer-reviewed
Apr, 2016

Micro Ultrasonic Motor Using a Cube With a Side Length of 0.5 mm

IEEE-ASME TRANSACTIONS ON MECHATRONICS
  • Tomoaki Mashimo

Volume
21
Number
2
First page
1189
Last page
1192
Language
English
Publishing type
Research paper (scientific journal)
DOI
10.1109/TMECH.2015.2511782
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Actuator miniaturization to submillimeter scales encounters difficult fabrication and serious torque dissipation caused by adhesion forces. This study presents a design for micro ultrasonic motors that enables microfabrication and motor actuation. The stator prototype, which is the smallest ultrasonic motor reported to date, comprises a metallic cube with a side length of 0.5 mm and a through-hole of 0.33-mm diameter at its center, and two piezoelectric elements adhered to its sides. Under two different applied voltages, the stator generates a driving force and transfers it to the rotor inserted in the through-hole. Performance assessments show that this micromotor generates an average angular velocity of 123 rad/s and a peak torque of 0.2 mu N.m. This torque value exceeds that of the existing micromotors.

Link information
DOI
https://doi.org/10.1109/TMECH.2015.2511782
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000372368700057&DestApp=WOS_CPL
ID information
  • DOI : 10.1109/TMECH.2015.2511782
  • ISSN : 1083-4435
  • eISSN : 1941-014X
  • Web of Science ID : WOS:000372368700057

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