2017年7月26日
20 Milliwatt class ultralow power integrated OCXO using polyimide and thin film metal connection suspended in vacuum packaging
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
- ,
- ,
- ,
- ,
- ,
- 開始ページ
- 435
- 終了ページ
- 438
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1109/TRANSDUCERS.2017.7994080
- 出版者・発行元
- Institute of Electrical and Electronics Engineers Inc.
This paper proposes a 20 mW class low-power and miniaturized oven controlled crystal oscillator (OCXO) by combination of the following two methods. (1) A crystal resonator and a CMOS-LSI for oscillation and oven control circuits are integrated for realizing an integrated OCXO chip. (2) The integrated chip is connected with thin film metal interconnection on a thin polyimide film and is suspended by an ultrasonic bonding technique in vacuum packaging. Based on the thermal analysis, we designed the thermally isolated connection. Experimental results showed that the fabricated OCXO successfully saved about 90% power consumption compared with the existing wire bonding implementation.
Web of Science ® の 関連論文(Related Records®)ビュー
- リンク情報