Misc.

Peer-reviewed
Nov, 2018

Stress-induced chemical reaction of Ti/Si multilayered nano-films

2018 MRS Fall Meeting and Exhibits
  • Hiroyuki HIRAKATA
    • ,
  • Takashi KAWAI
    • ,
  • Toshiyuki KONDO
    • ,
  • Kohji MINOSHIMA
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NM02.03.22
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