2011年
Epoxy-based permeable membrane fabrication for 3D microfluidic device
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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- 開始ページ
- 184
- 終了ページ
- 187
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1109/NEMS.2011.6017325
We report for the first time on a simple fabrication via UV photolithography for a free-standing filtration membrane made of epoxy-based photoresist and its integration on a multilevel microfluidic device. The fabrication process involves three-dimensional thick-photoresist microstructuring combined with standard negative photoresist processing. In this paper, a primary feature of membrane permeability dependence on fabrication process parameters was characterized by employing a cross-linking reaction model. The experiments using a multilevel microfluidic device demonstrated the proposed fabrication is capable of fabricating nano-filtration membrane while maintaining a sufficient mechanical strength for applications in polymer-based microfluidic devices. © 2011 IEEE.
- ID情報
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- DOI : 10.1109/NEMS.2011.6017325
- SCOPUS ID : 80053329784