MISC

2014年

LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)
  • Toshiyuki Tsuchiya
  • ,
  • Vijay Kumar Singh
  • ,
  • Yoshikazu Hirai
  • ,
  • Osamu Tabata

開始ページ
119
終了ページ
120
記述言語
英語
掲載種別
DOI
10.1109/OMN.2014.6924549
出版者・発行元
IEEE

We propose a new design of the electrostatically actuated deformable mirror with low voltage operation for adaptive optics especially for scanning laser ophthalmoscopy. By using torsional actuation and allowing the arrayed bottom fixed electrodes moving along vertical direction, the gaps between mirrors and the bottom electrodes keep small so that the electrostatic force is large enough to deform the mirror at low voltage. The operation concept was verified through both conventional and system level finite element analyses. The simulation results of 2-mu m-thick and 8-mm square membrane showed over 7 mu m deformation in the astigmatism mode at a 70 V actuation.

リンク情報
DOI
https://doi.org/10.1109/OMN.2014.6924549
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000366524800060&DestApp=WOS_CPL
ID情報
  • DOI : 10.1109/OMN.2014.6924549
  • ISSN : 2160-5033
  • Web of Science ID : WOS:000366524800060

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