MISC

2017年7月26日

Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Yoshikazu Hirai
  • ,
  • Kenta Terashima
  • ,
  • Katsuo Nakamura
  • ,
  • Toshiyuki Tsuchiya
  • ,
  • Osamu Tabata

開始ページ
431
終了ページ
434
記述言語
英語
掲載種別
DOI
10.1109/TRANSDUCERS.2017.7994079
出版者・発行元
Institute of Electrical and Electronics Engineers Inc.

We propose a low temperature process of alkali-metal vapor cells for microfabricated atomic clocks using alkali-metal source tablets (AMSTs) as alkali metal dispensers. An AMST contains precise quantities of cesium aside (CsN3) inside the porous alumina that is used to produce of Cs by thermal decomposition of CsN3. The AMST technology together with sequential plasma activated Si/glass bonding is a combination of technology that enables the low temperature wafer-level process of Cs vapor cells, resulting good quality of spectroscopic measurement for atomic clocks. The short-term frequency stability obtained with the fabricated cell was measured to be 2 × 10-11 at an integration time of 1 sec.

リンク情報
DOI
https://doi.org/10.1109/TRANSDUCERS.2017.7994079
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85029389426&origin=inward
ID情報
  • DOI : 10.1109/TRANSDUCERS.2017.7994079
  • SCOPUS ID : 85029389426

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