MISC

2017年1月5日

Simulation study of SU-8 structures realized by single-step projection photolithography

Proceedings of IEEE Sensors
  • K. Nakamura
  • ,
  • Y. Hirai
  • ,
  • T. Tsuchiya
  • ,
  • O. Tabata
  • ,
  • F. Larramendy
  • ,
  • O. Paul

記述言語
英語
掲載種別
DOI
10.1109/ICSENS.2016.7808444
出版者・発行元
Institute of Electrical and Electronics Engineers Inc.

This paper introduces the efficient three-dimensional (3D) simulation of thick SU-8 structures realized by single-step projection lithography. Profiles of 3D structures obtained by this lithography method depends on two process parameters: (i) The exposure dose and (ii) the focus depth. For fabricating complex 3D structures used in microfluidics or bio-engineering tools, the resulting geometries depending of these two process parameters should be predicted before processing. Although several lithography simulation methods have been developed for SU-8 processing, the existing models are unsuited for single-step projection lithography technique. This paper described how the simulation process have been developed and successfully tested on a specific design of honeycomb structures. Through the various experiments, simulation results revealed similar dependence on two process parameters, and the validity of simulation algorithm was therefore confirmed.

リンク情報
DOI
https://doi.org/10.1109/ICSENS.2016.7808444
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85010991312&origin=inward
ID情報
  • DOI : 10.1109/ICSENS.2016.7808444
  • ISSN : 2168-9229
  • ISSN : 1930-0395
  • SCOPUS ID : 85010991312

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