2016年9月13日
MEMS deformable mirror actuated by electrostatic piston array
International Conference on Optical MEMS and Nanophotonics
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- 巻
- 2016-
- 号
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1109/OMN.2016.7565822
- 出版者・発行元
- IEEE Computer Society
We have proposed a new electrostatically deformable mirror (ES-DM) capable of convex deformation and low-voltage actuation, which have been major issues for conventional ES-DMs. The principle of the device was confirmed by the operation of fabricated device that shows 3-μm displacement in a tilt deformation at 30 V. Simple mathematical model with high accuracy was constructed for real-time control and device design optimization.
- リンク情報
- ID情報
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- DOI : 10.1109/OMN.2016.7565822
- ISSN : 2160-5041
- ISSN : 2160-5033
- SCOPUS ID : 84990250356