2007年3月19日
1119 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験(要旨講演,マイクロメカトロニクス)
IIP情報・知能・精密機器部門講演会講演論文集
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- 巻
- 2007
- 号
- 開始ページ
- 66
- 終了ページ
- 69
- 記述言語
- 日本語
- 掲載種別
- 出版者・発行元
- 一般社団法人日本機械学会
A new on-chip tensile testing device using electrostatic actuation and detection was designed and fabricated from an SOI wafer to evaluate the mechanical properties of carbon nano materials such as carbon nano-tubes and fullerenes. In this device, force is generated by electrostatic comb drive actuator and tensile force on specimen is measured as the deformation of force-measuring spring. The specimen elongation and the spring deformation are detected as capacitance changes. As a result of design, we predicted high resolution of elongation and tensile force, which are 1nm and 1nN respectively. In order to assemble carbon nano-material on this device, a new technique for fabricating a free-standing fullerene nano-wire was proposed. This wire was fabricated using electron beam writing and sacrificial dry etching. By irradiated vacuum-deposited fullerene thin film with electron beam, polymerized fullerene nano-wires were patterned. Then, the doubly-supported beam structure of the fullerene nano-wire was obtained by sacrificial dry etching using XeF_2 gas.
- リンク情報
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- CiNii Articles
- http://ci.nii.ac.jp/naid/110007086512
- CiNii Books
- http://ci.nii.ac.jp/ncid/AA11902117
- ID情報
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- CiNii Articles ID : 110007086512
- CiNii Books ID : AA11902117