2017年
有限要素解析を用いたイオン液体型圧力センサの感度特性評価
マイクロ・ナノ工学シンポジウム
- ,
- ,
- ,
- ,
- ,
- 巻
- 2017
- 号
- 0
- 開始ページ
- PN
- 終了ページ
- 98
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1299/jsmemnm.2017.8.PN-98
- 出版者・発行元
- 一般社団法人 日本機械学会
This paper reports on a pressure sensor using ionic liquid to measure the pressure of the reflux flowing in the Body-on-a-Chip that mimics human physiological response by a microfluidic device. To design the sensor structure, the sensor output signal dependence of the pressure was estimated. First, deformation of PDMS thin film depending on the applied pressure was analyzed by finite element analysis considering the non-linear material property of a PDMS, and then the resistance change was estimated as the sensor output. Next, the sensor was fabricated by multilayer soft lithography technology, and the resistance change was measured. Comparison between the simulation results and measurements exhibits almost the same trend, revealing the capability to measure a small pressure range of 0 to 12 kPa required for the Body-on-a-Chip device.
- リンク情報
- ID情報
-
- DOI : 10.1299/jsmemnm.2017.8.PN-98
- CiNii Articles ID : 130006744963