論文

査読有り
2017年6月1日

Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap

Japanese Journal of Applied Physics
  • Amit Banerjee
  • ,
  • Yoshikazu Hirai
  • ,
  • Toshiyuki Tsuchiya
  • ,
  • Osamu Tabata

56
6
開始ページ
06GF06
終了ページ
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.7567/JJAP.56.06GF06
出版者・発行元
Japan Society of Applied Physics

Cold field emission characteristics of a fracture fabricated Si nanogap (&gt
100 nm) were investigated with an ascending electric field (voltage) sweep. The nanogap was formed by controlled fracture of a free-standing silicon micro-beam along o111p direction by a microelectromechanical device, which results in flat, smooth, and conformal electrode pairs. This facilitates simultaneous large area emission, which gives rise to a significant current at low bias voltage, which usually remains indiscernible in nanogaps of this size. The measured emission current-voltage (I-V) characteristics clearly depict two distinct regimes: a linear (I / V) regime at low bias voltage and a nonlinear [ln(I/V2) / V%1] regime at high bias voltage, separated by a transition point. We propose that the linear regime is owed to direct tunneling of electrons, whereas the nonlinear regime is due to Fowler-Nordheim type emission. This proposition essentially implies that the tunneling potential barrier gradually evolved from a rectangular shape to a triangular shape with increasing field (V). This type of evolution is usually observed in molecular size gaps. We have attempted to correlate the I-V curves acquired through the experiments with the electric field induced barrier shape evolution by numerical calculations involving standard quantum mechanics. The observed linear regime at low bias voltage (&lt
5 V) in a relatively large size gap (&gt
100 nm) is attributed to the fabrication method adopted in this study. The reported study and the fabricated device are significant for developing a futuristic thermotunneling refrigerator that will find a wide range of application in nanoelectronic devices.

リンク情報
DOI
https://doi.org/10.7567/JJAP.56.06GF06
ID情報
  • DOI : 10.7567/JJAP.56.06GF06
  • ISSN : 1347-4065
  • ISSN : 0021-4922
  • SCOPUS ID : 85020541062

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