論文

査読有り
2014年

Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes

IEEJ Transactions on Sensors and Micromachines
  • Praveen Singh Thakur
  • ,
  • Koji Sugano
  • ,
  • Toshiyuki Tsuchiya
  • ,
  • Osamu Tabata

134
12
開始ページ
392
終了ページ
399
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1541/ieejsmas.134.392
出版者・発行元
Institute of Electrical Engineers of Japan

Vibration coupling in out-of-plane resonators was investigated to design low acceleration sensitivity tuning fork gyroscopes (TFGs) of out-of-plane sensing axis type. Numerical and theoretical analysis was carried out on a spring-coupled translational x-axis TFG. The vibration coupling was controlled by separating the in-phase mode ( fin) from anti-phase mode ( fanti). The theoretical and numerical analysis showed that the acceleration sensitivity is inversely proportional to decoupling ratio, whereas the angular rate sensitivity does not change by keeping the fanti constant. For experimental verification, we designed four types of coupled resonators and fabricated them from SOI wafer: two of them are frame-coupled and the other two are spring-coupled. In each coupling type, one adopted a translational resonator and the other adopted a torsional resonator. The measured anti-phase vibration amplitude against in-phase oscillation decreased by weakening coupling which agreed with the numerical analysis. As decoupling ratio (=( fin - fanti)/ fanti) of the spring-coupled translational resonator increased from 0.09 to 0.29, the anti-phase vibration amplitude in the analysis and measurement decreased to 28% and 51%, respectively.

リンク情報
DOI
https://doi.org/10.1541/ieejsmas.134.392
ID情報
  • DOI : 10.1541/ieejsmas.134.392
  • ISSN : 1347-5525
  • ISSN : 1341-8939
  • SCOPUS ID : 84914178670

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