論文

査読有り
2012年6月

Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
  • Thakur Praveen Singh
  • ,
  • Koji Sugano
  • ,
  • Toshiyuki Tsuchiya
  • ,
  • Osamu Tabata

18
6
開始ページ
797
終了ページ
803
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1007/s00542-012-1510-4
出版者・発行元
SPRINGER

The frequency response of in-plane coupled resonators is used for investigating the acceleration sensitivity of a MEMS tuning fork gyroscope (TFG) and a new method of suppressing the acceleration output is presented. The unbalancing of two sense resonators in the TFG caused by fabrication errors converted an external vibration into anti-phase mode excitation. To reduce the acceleration output, decoupling between in- and anti-phase modal frequencies [decoupling ratio (DR)] is crucial, since coupled resonators may cause large anti-phase vibrations from the acceleration. The acceleration output model was verified using two coupled resonators with 1 and 5 % stiffness unbalance. FEM simulation results showed a 25 % reduction in the anti-phase vibration by increasing the decoupling ratio from 0.09 to 0.29, irrespective of the coupled resonators designs. Quantitative analysis of a TFG based on coupled resonators with 1 % stiffness unbalance showed the acceleration output decreased from 5.65 to 1.43 deg/s/g.

リンク情報
DOI
https://doi.org/10.1007/s00542-012-1510-4
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000304307700015&DestApp=WOS_CPL
ID情報
  • DOI : 10.1007/s00542-012-1510-4
  • ISSN : 0946-7076
  • eISSN : 1432-1858
  • Web of Science ID : WOS:000304307700015

エクスポート
BibTeX RIS