2012年6月
Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- ,
- ,
- ,
- 巻
- 18
- 号
- 6
- 開始ページ
- 797
- 終了ページ
- 803
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1007/s00542-012-1510-4
- 出版者・発行元
- SPRINGER
The frequency response of in-plane coupled resonators is used for investigating the acceleration sensitivity of a MEMS tuning fork gyroscope (TFG) and a new method of suppressing the acceleration output is presented. The unbalancing of two sense resonators in the TFG caused by fabrication errors converted an external vibration into anti-phase mode excitation. To reduce the acceleration output, decoupling between in- and anti-phase modal frequencies [decoupling ratio (DR)] is crucial, since coupled resonators may cause large anti-phase vibrations from the acceleration. The acceleration output model was verified using two coupled resonators with 1 and 5 % stiffness unbalance. FEM simulation results showed a 25 % reduction in the anti-phase vibration by increasing the decoupling ratio from 0.09 to 0.29, irrespective of the coupled resonators designs. Quantitative analysis of a TFG based on coupled resonators with 1 % stiffness unbalance showed the acceleration output decreased from 5.65 to 1.43 deg/s/g.
- リンク情報
- ID情報
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- DOI : 10.1007/s00542-012-1510-4
- ISSN : 0946-7076
- eISSN : 1432-1858
- Web of Science ID : WOS:000304307700015