2012年1月
Circular multilayer zone plate for high-energy x-ray nano-imaging
REVIEW OF SCIENTIFIC INSTRUMENTS
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- 巻
- 83
- 号
- 1
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/1.3676165
- 出版者・発行元
- AMER INST PHYSICS
A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern. (C) 2012 American Institute of Physics. [doi:10.1063/1.3676165]
- リンク情報
- ID情報
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- DOI : 10.1063/1.3676165
- ISSN : 0034-6748
- eISSN : 1089-7623
- Web of Science ID : WOS:000300594900039