論文

査読有り
2012年1月

Circular multilayer zone plate for high-energy x-ray nano-imaging

REVIEW OF SCIENTIFIC INSTRUMENTS
  • Takahisa Koyama
  • ,
  • Hidekazu Takano
  • ,
  • Shigeki Konishi
  • ,
  • Takuya Tsuji
  • ,
  • Hisataka Takenaka
  • ,
  • Satoshi Ichimaru
  • ,
  • Tadayuki Ohchi
  • ,
  • Yasushi Kagoshima

83
1
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1063/1.3676165
出版者・発行元
AMER INST PHYSICS

A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern. (C) 2012 American Institute of Physics. [doi:10.1063/1.3676165]

リンク情報
DOI
https://doi.org/10.1063/1.3676165
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000300594900039&DestApp=WOS_CPL
ID情報
  • DOI : 10.1063/1.3676165
  • ISSN : 0034-6748
  • eISSN : 1089-7623
  • Web of Science ID : WOS:000300594900039

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