2021年12月2日
Fabrication of AlN templates by high-temperature face-to-face annealing for deep UV LEDs
Japanese Journal of Applied Physics
- ,
- 巻
- 60
- 号
- 12
- 開始ページ
- 120502
- 終了ページ
- 120502
- 記述言語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.35848/1347-4065/ac3026
- 出版者・発行元
- IOP Publishing
Abstract
AlN templates fabricated via a combination of sputtering deposition and post-deposition high-temperature face-to-face annealing can be applied to deep-ultraviolet (DUV) light-emitting devices because of their extremely low threading dislocation density (TDD) despite their low-cost and simple fabrication process. First, this paper summarizes the overview and essential crystalline characteristics of the face-to-face annealed sputter-deposited AlN template (FFA Sp-AlN). Thereafter, recent progress in the TDD reduction of the FFA Sp-AlN and the metalorganic vapor phase epitaxy of AlN and AlxGa1−xN on the FFA Sp-AlN have been reviewed. The TDD of approximately 4 × 107 cm−2 was obtained on the sapphire substrates with an AlN film thickness of 1.2 μm. Finally, the potential of the low-TDD FFA Sp-AlN has been discussed by demonstrating the performances of DUV light-emitting diodes fabricated on the FFA Sp-AlN.
AlN templates fabricated via a combination of sputtering deposition and post-deposition high-temperature face-to-face annealing can be applied to deep-ultraviolet (DUV) light-emitting devices because of their extremely low threading dislocation density (TDD) despite their low-cost and simple fabrication process. First, this paper summarizes the overview and essential crystalline characteristics of the face-to-face annealed sputter-deposited AlN template (FFA Sp-AlN). Thereafter, recent progress in the TDD reduction of the FFA Sp-AlN and the metalorganic vapor phase epitaxy of AlN and AlxGa1−xN on the FFA Sp-AlN have been reviewed. The TDD of approximately 4 × 107 cm−2 was obtained on the sapphire substrates with an AlN film thickness of 1.2 μm. Finally, the potential of the low-TDD FFA Sp-AlN has been discussed by demonstrating the performances of DUV light-emitting diodes fabricated on the FFA Sp-AlN.
- リンク情報
- ID情報
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- DOI : 10.35848/1347-4065/ac3026
- ISSN : 0021-4922
- eISSN : 1347-4065