論文

査読有り
2017年3月

Quantitative NEXAFS and solid-state NMR studies of sp(3)/(sp(2) + sp(3)) ratio in the hydrogenated DLC films

DIAMOND AND RELATED MATERIALS
  • XiaoLong Zhou
  • ,
  • Sarayut Tunmee
  • ,
  • Tsuneo Suzuki
  • ,
  • Pat Phothongkam
  • ,
  • Kazuhiro Kanda
  • ,
  • Keiji Komatsu
  • ,
  • Seiichi Kawahara
  • ,
  • Haruhiko Ito
  • ,
  • Hidetoshi Saitoh

73
開始ページ
232
終了ページ
240
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.diamond.2016.09.026
出版者・発行元
ELSEVIER SCIENCE SA

The classification of diamond-like carbon (DLC) films is imperative in guiding large-scale industrial productions. However, it is not easy to classify this issue based on the structural composition and obtained properties, especially, when the film contains a certain amount of hydrogen. In the present study, two types of hydrogenated DLC films were prepared by electron-cyclotron-resonance chemical-vapor-deposition method with pure C2H2 and Ar gasses with applied negative bias voltages of 0 and 0.5 kV. The structural and surface analyses of these films have shown significant changes of physical and mechanical properties with high reproducibility and low oxygen contents. The comparison of H/C atomic ratio extracted from the combination of Rutherford backscattering and elastic recoil detection analysis and the solid-state nuclear magnetic resonance (NMR) illustrated that the NMR analysis of the present work provides a significant contribution. Therefore, we compared quantitatively the sp(3)/(sp(2) + sp(3)) ratios in the hydrogenated DLC films using the near-edge X-ray absorption fine-structure (NEXAFS) and solid-state NMR methods. The signals of hydrocarbon sp3 ( CH, CH2 and CH3) and a network of sp(3) hybridized carbon (C-sp(3)) can be separated by the solid-state C-13 NMR measurement, from which it is concluded that the former do not enable a detailed interpretation for the internal structural changes of the hydrogenated DLC films with the increase of applied bias voltage. (C) 2016 Elsevier B.V. All rights reserved.

Web of Science ® 被引用回数 : 7

リンク情報
DOI
https://doi.org/10.1016/j.diamond.2016.09.026
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000399519100035&DestApp=WOS_CPL

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