- ELSEVIER SCIENCE SA
The classification of diamond-like carbon (DLC) films is imperative in guiding large-scale industrial productions. However, it is not easy to classify this issue based on the structural composition and obtained properties, especially, when the film contains a certain amount of hydrogen. In the present study, two types of hydrogenated DLC films were prepared by electron-cyclotron-resonance chemical-vapor-deposition method with pure C2H2 and Ar gasses with applied negative bias voltages of 0 and 0.5 kV. The structural and surface analyses of these films have shown significant changes of physical and mechanical properties with high reproducibility and low oxygen contents. The comparison of H/C atomic ratio extracted from the combination of Rutherford backscattering and elastic recoil detection analysis and the solid-state nuclear magnetic resonance (NMR) illustrated that the NMR analysis of the present work provides a significant contribution. Therefore, we compared quantitatively the sp(3)/(sp(2) + sp(3)) ratios in the hydrogenated DLC films using the near-edge X-ray absorption fine-structure (NEXAFS) and solid-state NMR methods. The signals of hydrocarbon sp3 ( CH, CH2 and CH3) and a network of sp(3) hybridized carbon (C-sp(3)) can be separated by the solid-state C-13 NMR measurement, from which it is concluded that the former do not enable a detailed interpretation for the internal structural changes of the hydrogenated DLC films with the increase of applied bias voltage. (C) 2016 Elsevier B.V. All rights reserved.
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