論文

査読有り
2017年10月

Soft X-ray irradiation effect on the fluorinated DLC film

DIAMOND AND RELATED MATERIALS
  • Hiroki Takamatsu
  • ,
  • Masahito Niibe
  • ,
  • XiaoLong Zhou
  • ,
  • Keiji Komatsu
  • ,
  • Hidetoshi Saitoh
  • ,
  • Hiroki Akasaka
  • ,
  • Akihiro Saiga
  • ,
  • Koji Tamada
  • ,
  • Masahito Tagawa
  • ,
  • Kumiko Yokota
  • ,
  • Yuichi Furuyama
  • ,
  • Kazuhiro Kanda

79
開始ページ
14
終了ページ
20
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.diamond.2017.08.004
出版者・発行元
ELSEVIER SCIENCE SA

The irradiation effect on fluorinated diamond-like carbon (F-DLC) film was investigated by measuring the dose dependence of various film properties using synchrotron radiation (SR) in the soft X-rays in the SR dose region from 0 to 2000 mA h. Film flatness was maintained but various film properties and surface properties were found to be changed by the SR irradiation. Wettability of the F-DLC film surface increased dramatically within 20 mA h SR exposure, which was ascribed to the decrease in fluorine on the film surface. Film thickness, film density, composition ratio of fluorine atom in film decreased and sp(2) / (sp(2) + sp(3)) ratio of carbon atoms increased within 300 mA h SR exposure, which were ascribed to the desorption of species containing fluorine atoms. In addition, dominant desorbed species emitted from F-DLC film were found in the fluorocarbon group, CFx. Changes in film properties and film thickness did not proceed, when fluorine content in the F-DLC film decreased to about 10% after the 300 mA h SR exposure.

Web of Science ® 被引用回数 : 2

リンク情報
DOI
https://doi.org/10.1016/j.diamond.2017.08.004
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000414111900003&DestApp=WOS_CPL

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