- HINDAWI PUBLISHING CORP
The compositions and bonding states of the amorphous hydrogenated carbon films at various thicknesses were evaluated via near-edge X-ray absorption fine-structure (NEXAFS) and elastic recoil detection analysis combined with Rutherford backscattering spectrometry. The absolute carbon sp(2) contents were determined to decrease to 65% from 73%, while the hydrogen contents increase from 26 to 33 at.% as the film thickness increases. In addition, as the film thickness increases, the pi* (C=C) sigma* (C-H), sigma* (C=C), and sigma* (C C) bonding states were found to increase, whereas the pi* (C C) and sigma* (C-C) bonding states were observed to decrease in the NEXAFS spectra. Consequently, the film thickness is a key factor to evaluate the composition and bonding state of the films.
Web of Science ® 被引用回数 : 10
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- DOI : 10.1155/2015/276790
- ISSN : 1687-4110
- eISSN : 1687-4129
- Web of Science ID : WOS:000367608500001