論文

査読有り
2015年

Study of Synchrotron Radiation Near-Edge X-Ray Absorption Fine-Structure of Amorphous Hydrogenated Carbon Films at Various Thicknesses

JOURNAL OF NANOMATERIALS
  • Sarayut Tunmee
  • ,
  • Ratchadaporn Supruangnet
  • ,
  • Hideki Nakajima
  • ,
  • XiaoLong Zhou
  • ,
  • Satoru Arakawa
  • ,
  • Tsuneo Suzuki
  • ,
  • Kazuhiro Kanda
  • ,
  • Haruhiko Ito
  • ,
  • Keiji Komatsu
  • ,
  • Hidetoshi Saitoh

2015
開始ページ
1
終了ページ
7
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1155/2015/276790
出版者・発行元
HINDAWI PUBLISHING CORP

The compositions and bonding states of the amorphous hydrogenated carbon films at various thicknesses were evaluated via near-edge X-ray absorption fine-structure (NEXAFS) and elastic recoil detection analysis combined with Rutherford backscattering spectrometry. The absolute carbon sp(2) contents were determined to decrease to 65% from 73%, while the hydrogen contents increase from 26 to 33 at.% as the film thickness increases. In addition, as the film thickness increases, the pi* (C=C) sigma* (C-H), sigma* (C=C), and sigma* (C C) bonding states were found to increase, whereas the pi* (C C) and sigma* (C-C) bonding states were observed to decrease in the NEXAFS spectra. Consequently, the film thickness is a key factor to evaluate the composition and bonding state of the films.

Web of Science ® 被引用回数 : 10

リンク情報
DOI
https://doi.org/10.1155/2015/276790
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000367608500001&DestApp=WOS_CPL
ID情報
  • DOI : 10.1155/2015/276790
  • ISSN : 1687-4110
  • eISSN : 1687-4129
  • Web of Science ID : WOS:000367608500001

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