論文

査読有り
2008年

Neutron irradiation effects on radiation damage formed by ion implantation in silicon

REPORT OF RESEARCH CENTER OF ION BEAM TECHNOLOGY, HOSEI UNIVERSITY, PROCEEDINGS
  • A. Kinomura
  • A. Chayahara
  • Y. Mokuno
  • N. Tsubouch
  • Y. Horino
  • T. Yoshiie
  • Y. Hayashi
  • Q. Xu
  • Y. Nakano
  • Y. Ito
  • R. Ishigami
  • K. Yasuda
  • 全て表示

26
開始ページ
47
終了ページ
50
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
出版者・発行元
HOSEI UNIV RESEARCH CENTER ION BEAM TECHNOLOGY

Neutron irradiation effects have been investigated for radiation damage in self-ion implanted silicon. Si samples implanted with (0.5-2)x10(15) Si/cm(2) were neutron-irradiated in a nuclear reactor at elevated temperatures. Rutherford backscattering/channeling measurements revealed that the annealing of heavily disordered (not amorphized) samples was enhanced by the neutron irradiation. The observed annealing behaviors were compared with the previously reported ion-beam-annealing studies.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000254819200009&DestApp=WOS_CPL
ID情報
  • ISSN : 0914-2908
  • Web of Science ID : WOS:000254819200009

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