2008年
Neutron irradiation effects on radiation damage formed by ion implantation in silicon
REPORT OF RESEARCH CENTER OF ION BEAM TECHNOLOGY, HOSEI UNIVERSITY, PROCEEDINGS
- 巻
- 号
- 26
- 開始ページ
- 47
- 終了ページ
- 50
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- 出版者・発行元
- HOSEI UNIV RESEARCH CENTER ION BEAM TECHNOLOGY
Neutron irradiation effects have been investigated for radiation damage in self-ion implanted silicon. Si samples implanted with (0.5-2)x10(15) Si/cm(2) were neutron-irradiated in a nuclear reactor at elevated temperatures. Rutherford backscattering/channeling measurements revealed that the annealing of heavily disordered (not amorphized) samples was enhanced by the neutron irradiation. The observed annealing behaviors were compared with the previously reported ion-beam-annealing studies.
- リンク情報
- ID情報
-
- ISSN : 0914-2908
- Web of Science ID : WOS:000254819200009