MISC

2002年2月

Rotational honeycomb epitaxy of Ru thin films on sapphire (0001) substrate

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
  • S Yamada
  • ,
  • Y Nishibe
  • ,
  • M Saizaki
  • ,
  • H Kitajima
  • ,
  • S Ohtsubo
  • ,
  • A Morimoto
  • ,
  • T Shimizu
  • ,
  • K Ishida
  • ,
  • Y Masaki

41
2B
開始ページ
L206
終了ページ
L208
記述言語
英語
掲載種別
DOI
10.1143/JJAP.41.L206
出版者・発行元
INST PURE APPLIED PHYSICS

Rotational honeycomb epitaxy of hexagonal Ru films was achieved on c-plane sapphire substrates by pulsed laser ablation with the a-axis ratio of root3. The crystal structure and crystallinity of the Ru films were examined by X-ray diffraction and pole figure measurements, respectively. The Ru films were found to be epitaxially grown with an a-axis rotation by 30degrees around the a-axis of sapphire. resulting in the crystallographic-relationship of (0001)Ru // (0001) sapphire and (11 (2) over bar0) Ru // (10 (1) over bar0) sapphire. This is because the lattice mismatch between (11 (2) over bar0) Ru and (10 (1) over bar0) sapphire is as small as about 1.3%.

リンク情報
DOI
https://doi.org/10.1143/JJAP.41.L206
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000176443800015&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/JJAP.41.L206
  • ISSN : 0021-4922
  • Web of Science ID : WOS:000176443800015

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