論文

査読有り
2020年8月

Enhanced photoluminescence from strained Ge-on-Insulator surface-passivated with hydrogenated amorphous Si

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
  • Kenta Niikura
  • ,
  • Natsuki Yamahata
  • ,
  • Yusuke Hoshi
  • ,
  • Tsukasa Takamura
  • ,
  • Kimihiko Saito
  • ,
  • Makoto Konagai
  • ,
  • Kentarou Sawano

115
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.mssp.2020.105104
出版者・発行元
ELSEVIER SCI LTD

We study influences of the Ge-on-Insulator (GOI) fabrication and its surface passivation by deposition of a hydrogenated amorphous Si (a-Si:H) layer on light emission properties from a strained Ge. It is shown that the GOI fabrication leads to drastic enhancements of room temperature photoluminescence (PL). One of the origins is elimination of a defective Ge layer inevitably formed due to strain-relaxation. We also find that the surface passivation with the a-Si:H layer can further enhance the PL intensity provided that the dopant type, porn, of the a-Si:H matches that of the Ge. As a result, we obtain the PL intensity enhancements up to 15 times compared to as-grown Ge-on-Si, which indicates that the GOI surface-passivated with a-Si:H is a promising structure toward Ge-based high efficient light emitters on the Si platform.

リンク情報
DOI
https://doi.org/10.1016/j.mssp.2020.105104
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000535469600009&DestApp=WOS_CPL
ID情報
  • DOI : 10.1016/j.mssp.2020.105104
  • ISSN : 1369-8001
  • eISSN : 1873-4081
  • Web of Science ID : WOS:000535469600009

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