We investigated the processing of a metal nanogranular thin film of Co-Ti-O system by combining a colloidal wet process (inverse micelle method) and a dry process (plasma treatment). Both TEM and EDS analyses revealed,that the film was prepared along with suppression of metal cobalt nanoparticles' oxidization. Results showed that plasma processing provides new possibilities for processing of materials that are difficult to prepare under equilibrium conditions. (c) 2006 Elsevier B.V. All rights reserved.