2015年
Surface acoustic wave diagnosis of vacancy orbital with electric quadrupoles in silicon
INTERNATIONAL CONFERENCE ON STRONGLY CORRELATED ELECTRON SYSTEMS 2014 (SCES2014)
- 巻
- 592
- 号
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1088/1742-6596/592/1/012150
- 出版者・発行元
- IOP PUBLISHING LTD
We demonstrate ultrasonic diagnosis of vacancies in boron-doped silicon wafers currently used in device manufacturing. The low-temperature softening of elastic constants measured by surface acoustic waves (SAW) as well as bulk ultrasonic waves is caused by a coupling of elastic strains to electric quadrupoles of the vacancy orbital in silicon wafers. Using interdigital transducers with a comb gap of 2.5 mu m on a piezoelectric ZnO film deposited on the (001) surface of the wafer, we observed the softening of 1.9x10(-4) in relative amount of the elastic constant C-s below 2 K down to 23 mK. Taking account of the strong quadrupole-strain interaction, we deduced a small vacancy concentration 3.1x10(12) cm(-3) in the surface layer of the wafer within a penetration depth 3.5 mu m of the SAW.
- リンク情報
-
- DOI
- https://doi.org/10.1088/1742-6596/592/1/012150
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000352239200150&DestApp=WOS_CPL
- URL
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84925337168&origin=inward
- ID情報
-
- DOI : 10.1088/1742-6596/592/1/012150
- ISSN : 1742-6588
- SCOPUS ID : 84925337168
- Web of Science ID : WOS:000352239200150