Nov, 2007
Vacancy distribution in growth-rate-varied CZ silicon crystal observed by low-temperature ultrasonic measurements
Proceeding of the forum on the science and technology of silicon materials 2007
- ,
- ,
- ,
- ,
- ,
- ,
- First page
- 135
- Last page
- 140
- Language
- English
- Publishing type
- Research paper (international conference proceedings)